Characteristics of Carbide Interfacial Layer Formed During Deposition of DLC Films on 316L Stainless Steel Substrate

Characteristics of Carbide Interfacial Layer Formed During Deposition of DLC Films on 316L Stainless Steel Substrate

The paper presents the analysis of formation of interfacial layer during deposition of diamond like carbon film (DLC) on the 316L stainless steel by capacitive plasma discharge in the CH4 atmosphere. The structure of the interfacial layer of DLC film was strongly affected by the temperature increase...

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Bibliographic Details
Main Author:	Dudek M.
Format:	Article
Language:	English
Published:	Polish Academy of Sciences 2017-12-01
Series:	Archives of Metallurgy and Materials
Subjects:	RF PECVD carbon films diamond like carbon film growth carbides formation
Online Access:	http://www.degruyter.com/view/j/amm.2017.62.issue-4/amm-2017-0326/amm-2017-0326.xml?format=INT

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