Lithium Niobate Micro-transducers matrix design
In this work, a two-dimensional (2D) Lithium Niobate (LiNbO3) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These steps are preceded by the optical mask conception, which defines the 2D matrix pa...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2019-01-01
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| Series: | MATEC Web of Conferences |
| Online Access: | https://www.matec-conferences.org/articles/matecconf/pdf/2019/30/matecconf_incer2019_01001.pdf |
| _version_ | 1831538621628284928 |
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| author | El Rammouz Hala Benmeddour Farouk Assaad Jamal Moulin Emmanuel Dupont Lucie Smagin Nikolay Zaatar Youssef Herro Ziad |
| author_facet | El Rammouz Hala Benmeddour Farouk Assaad Jamal Moulin Emmanuel Dupont Lucie Smagin Nikolay Zaatar Youssef Herro Ziad |
| author_sort | El Rammouz Hala |
| collection | DOAJ |
| description | In this work, a two-dimensional (2D) Lithium Niobate (LiNbO3) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These steps are preceded by the optical mask conception, which defines the 2D matrix pattern. In contrary to the one element case, this μTs matrix allows to automatically scan a desired structure in real time. The μTs matrix is characterized using an impedance analyzer. Furthermore, the experimental tests carried out in order to demonstrate the matrix functionality at low frequencies [200 - 800] kHz are presented. |
| first_indexed | 2024-12-16T23:27:22Z |
| format | Article |
| id | doaj.art-9bc71b5b300742508642351ccdfd6f3b |
| institution | Directory Open Access Journal |
| issn | 2261-236X |
| language | English |
| last_indexed | 2024-12-16T23:27:22Z |
| publishDate | 2019-01-01 |
| publisher | EDP Sciences |
| record_format | Article |
| series | MATEC Web of Conferences |
| spelling | doaj.art-9bc71b5b300742508642351ccdfd6f3b2022-12-21T22:11:59ZengEDP SciencesMATEC Web of Conferences2261-236X2019-01-012810100110.1051/matecconf/201928101001matecconf_incer2019_01001Lithium Niobate Micro-transducers matrix designEl Rammouz HalaBenmeddour Farouk0Assaad Jamal1Moulin Emmanuel2Dupont Lucie3Smagin Nikolay4Zaatar Youssef5Herro Ziad6UPHF, CNRS, Univ. Lille, YNCREA, Centrale LilleUPHF, CNRS, Univ. Lille, YNCREA, Centrale LilleUPHF, CNRS, Univ. Lille, YNCREA, Centrale LilleUPHF, CNRS, Univ. Lille, YNCREA, Centrale LilleUPHF, CNRS, Univ. Lille, YNCREA, Centrale LilleUniversité Libanaise, Faculté des Sciences II, Laboratoire de Physique AppliquéeUniversité Libanaise, Faculté des Sciences II, Laboratoire de Physique AppliquéeIn this work, a two-dimensional (2D) Lithium Niobate (LiNbO3) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These steps are preceded by the optical mask conception, which defines the 2D matrix pattern. In contrary to the one element case, this μTs matrix allows to automatically scan a desired structure in real time. The μTs matrix is characterized using an impedance analyzer. Furthermore, the experimental tests carried out in order to demonstrate the matrix functionality at low frequencies [200 - 800] kHz are presented.https://www.matec-conferences.org/articles/matecconf/pdf/2019/30/matecconf_incer2019_01001.pdf |
| spellingShingle | El Rammouz Hala Benmeddour Farouk Assaad Jamal Moulin Emmanuel Dupont Lucie Smagin Nikolay Zaatar Youssef Herro Ziad Lithium Niobate Micro-transducers matrix design MATEC Web of Conferences |
| title | Lithium Niobate Micro-transducers matrix design |
| title_full | Lithium Niobate Micro-transducers matrix design |
| title_fullStr | Lithium Niobate Micro-transducers matrix design |
| title_full_unstemmed | Lithium Niobate Micro-transducers matrix design |
| title_short | Lithium Niobate Micro-transducers matrix design |
| title_sort | lithium niobate micro transducers matrix design |
| url | https://www.matec-conferences.org/articles/matecconf/pdf/2019/30/matecconf_incer2019_01001.pdf |
| work_keys_str_mv | AT elrammouzhala lithiumniobatemicrotransducersmatrixdesign AT benmeddourfarouk lithiumniobatemicrotransducersmatrixdesign AT assaadjamal lithiumniobatemicrotransducersmatrixdesign AT moulinemmanuel lithiumniobatemicrotransducersmatrixdesign AT dupontlucie lithiumniobatemicrotransducersmatrixdesign AT smaginnikolay lithiumniobatemicrotransducersmatrixdesign AT zaataryoussef lithiumniobatemicrotransducersmatrixdesign AT herroziad lithiumniobatemicrotransducersmatrixdesign |