Multi-height micropyramids based pressure sensor with tunable sensing properties for robotics and step tracking applications
Abstract Precise sensing of pressure is essential for various mechanical and electrical systems. The recent emergence of flexible pressure sensors has enabled novel applications, such as human–machine interfaces, soft robotics, and wearable devices. Specifically, the piezoresistive sensing scheme is...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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SpringerOpen
2022-06-01
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| Series: | Micro and Nano Systems Letters |
| Subjects: | |
| Online Access: | https://doi.org/10.1186/s40486-022-00149-4 |
| _version_ | 1818468067248701440 |
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| author | Dongik Oh Jungyeon Seo Hang Gyeom Kim Chaehyun Ryu Sang-Won Bang Sukho Park Hoe Joon Kim |
| author_facet | Dongik Oh Jungyeon Seo Hang Gyeom Kim Chaehyun Ryu Sang-Won Bang Sukho Park Hoe Joon Kim |
| author_sort | Dongik Oh |
| collection | DOAJ |
| description | Abstract Precise sensing of pressure is essential for various mechanical and electrical systems. The recent emergence of flexible pressure sensors has enabled novel applications, such as human–machine interfaces, soft robotics, and wearable devices. Specifically, the piezoresistive sensing scheme is widely adapted for flexible pressure sensors as it is simple and exhibits outstanding measurement sensitivity and stability. The sensing properties of piezoresistive pressure sensors mainly depends on the materials and contact morphologies at the interface. This paper proposes a flexible pressure sensor based on multi-height microstructures in which the measurement sensitivity and detection range are tunable. Such tunability is due to the sequential contact of micropyramids with different heights. The multi-height micropyramid structured PDMS layer with stamp-coated multi-walled carbon nanotubes (MWCNTs) acts as a conductive active layer and a gold interdigitated electrode (IDE) patterned polyimide (PI) layer works as the bottom electrode. The fabricated sensor exhibits a sensitivity of 0.19 kPa−1, a fast response speed of 20 ms, and a detection range of up to 100 kPa. The sensor is applied to a robotic gripper for object recognition and integrated into a shoe to track walking motions. |
| first_indexed | 2024-04-13T21:08:55Z |
| format | Article |
| id | doaj.art-9bd3d2db5bbc4309a64d66bcb769ad5f |
| institution | Directory Open Access Journal |
| issn | 2213-9621 |
| language | English |
| last_indexed | 2024-04-13T21:08:55Z |
| publishDate | 2022-06-01 |
| publisher | SpringerOpen |
| record_format | Article |
| series | Micro and Nano Systems Letters |
| spelling | doaj.art-9bd3d2db5bbc4309a64d66bcb769ad5f2022-12-22T02:29:54ZengSpringerOpenMicro and Nano Systems Letters2213-96212022-06-011011710.1186/s40486-022-00149-4Multi-height micropyramids based pressure sensor with tunable sensing properties for robotics and step tracking applicationsDongik Oh0Jungyeon Seo1Hang Gyeom Kim2Chaehyun Ryu3Sang-Won Bang4Sukho Park5Hoe Joon Kim6Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST)Department of Robotics and Mechatronics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST)Abstract Precise sensing of pressure is essential for various mechanical and electrical systems. The recent emergence of flexible pressure sensors has enabled novel applications, such as human–machine interfaces, soft robotics, and wearable devices. Specifically, the piezoresistive sensing scheme is widely adapted for flexible pressure sensors as it is simple and exhibits outstanding measurement sensitivity and stability. The sensing properties of piezoresistive pressure sensors mainly depends on the materials and contact morphologies at the interface. This paper proposes a flexible pressure sensor based on multi-height microstructures in which the measurement sensitivity and detection range are tunable. Such tunability is due to the sequential contact of micropyramids with different heights. The multi-height micropyramid structured PDMS layer with stamp-coated multi-walled carbon nanotubes (MWCNTs) acts as a conductive active layer and a gold interdigitated electrode (IDE) patterned polyimide (PI) layer works as the bottom electrode. The fabricated sensor exhibits a sensitivity of 0.19 kPa−1, a fast response speed of 20 ms, and a detection range of up to 100 kPa. The sensor is applied to a robotic gripper for object recognition and integrated into a shoe to track walking motions.https://doi.org/10.1186/s40486-022-00149-4Flexible pressure sensorPiezoresistiveMulti-heightCarbon nanotubesRobotic sensor |
| spellingShingle | Dongik Oh Jungyeon Seo Hang Gyeom Kim Chaehyun Ryu Sang-Won Bang Sukho Park Hoe Joon Kim Multi-height micropyramids based pressure sensor with tunable sensing properties for robotics and step tracking applications Micro and Nano Systems Letters Flexible pressure sensor Piezoresistive Multi-height Carbon nanotubes Robotic sensor |
| title | Multi-height micropyramids based pressure sensor with tunable sensing properties for robotics and step tracking applications |
| title_full | Multi-height micropyramids based pressure sensor with tunable sensing properties for robotics and step tracking applications |
| title_fullStr | Multi-height micropyramids based pressure sensor with tunable sensing properties for robotics and step tracking applications |
| title_full_unstemmed | Multi-height micropyramids based pressure sensor with tunable sensing properties for robotics and step tracking applications |
| title_short | Multi-height micropyramids based pressure sensor with tunable sensing properties for robotics and step tracking applications |
| title_sort | multi height micropyramids based pressure sensor with tunable sensing properties for robotics and step tracking applications |
| topic | Flexible pressure sensor Piezoresistive Multi-height Carbon nanotubes Robotic sensor |
| url | https://doi.org/10.1186/s40486-022-00149-4 |
| work_keys_str_mv | AT dongikoh multiheightmicropyramidsbasedpressuresensorwithtunablesensingpropertiesforroboticsandsteptrackingapplications AT jungyeonseo multiheightmicropyramidsbasedpressuresensorwithtunablesensingpropertiesforroboticsandsteptrackingapplications AT hanggyeomkim multiheightmicropyramidsbasedpressuresensorwithtunablesensingpropertiesforroboticsandsteptrackingapplications AT chaehyunryu multiheightmicropyramidsbasedpressuresensorwithtunablesensingpropertiesforroboticsandsteptrackingapplications AT sangwonbang multiheightmicropyramidsbasedpressuresensorwithtunablesensingpropertiesforroboticsandsteptrackingapplications AT sukhopark multiheightmicropyramidsbasedpressuresensorwithtunablesensingpropertiesforroboticsandsteptrackingapplications AT hoejoonkim multiheightmicropyramidsbasedpressuresensorwithtunablesensingpropertiesforroboticsandsteptrackingapplications |