Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns
A dedicated transmission helium ion microscope (THIM) for sub-50 keV helium has been constructed to investigate ion scattering processes and contrast mechanisms, aiding the development of new imaging and analysis modalities. Unlike a commercial helium ion microscope (HIM), the in-house built instrum...
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| Format: | Article |
| Language: | English |
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Beilstein-Institut
2019-08-01
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| Series: | Beilstein Journal of Nanotechnology |
| Subjects: | |
| Online Access: | https://doi.org/10.3762/bjnano.10.160 |
| _version_ | 1819093381768282112 |
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| author | Michael Mousley Santhana Eswara Olivier De Castro Olivier Bouton Nico Klingner Christoph T. Koch Gregor Hlawacek Tom Wirtz |
| author_facet | Michael Mousley Santhana Eswara Olivier De Castro Olivier Bouton Nico Klingner Christoph T. Koch Gregor Hlawacek Tom Wirtz |
| author_sort | Michael Mousley |
| collection | DOAJ |
| description | A dedicated transmission helium ion microscope (THIM) for sub-50 keV helium has been constructed to investigate ion scattering processes and contrast mechanisms, aiding the development of new imaging and analysis modalities. Unlike a commercial helium ion microscope (HIM), the in-house built instrument allows full flexibility in experimental configuration. Here, we report projection imaging and intensity patterns obtained from powder and bulk crystalline samples using stationary broad-beam as well as convergent-beam illumination conditions in THIM. The He+ ions formed unexpected spot patterns in the far field for MgO, BN and NaCl powder samples, but not for Au-coated MgO. The origin of the spot patterns in these samples was investigated. Surface diffraction of ions was excluded as a possible cause because the recorded scattering angles do not correspond to the predicted Bragg angles. Complementary secondary electron (SE) imaging in the HIM revealed that these samples charge significantly under He+ ion irradiation. The spot patterns obtained in the THIM experiments are explained as artefacts related to sample charging. The results presented here indicate that factors other than channeling, blocking and surface diffraction of ions have an impact on the final intensity distribution in the far field. Hence, the different processes contributing to the final intensities will need to be understood in order to decouple and study the relevant ion-beam scattering and deflection phenomena. |
| first_indexed | 2024-12-21T23:10:37Z |
| format | Article |
| id | doaj.art-9bf3d0611bd0418d93fc4866c7dac24f |
| institution | Directory Open Access Journal |
| issn | 2190-4286 |
| language | English |
| last_indexed | 2024-12-21T23:10:37Z |
| publishDate | 2019-08-01 |
| publisher | Beilstein-Institut |
| record_format | Article |
| series | Beilstein Journal of Nanotechnology |
| spelling | doaj.art-9bf3d0611bd0418d93fc4866c7dac24f2022-12-21T18:47:02ZengBeilstein-InstitutBeilstein Journal of Nanotechnology2190-42862019-08-011011648165710.3762/bjnano.10.1602190-4286-10-160Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patternsMichael Mousley0Santhana Eswara1Olivier De Castro2Olivier Bouton3Nico Klingner4Christoph T. Koch5Gregor Hlawacek6Tom Wirtz7Advanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, LuxembourgAdvanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, LuxembourgAdvanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, LuxembourgAdvanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, LuxembourgInstitute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf e.V., Bautzner Landstr. 400, 01328 Dresden, GermanyDepartment of Physics, Humboldt University of Berlin, Newtonstraße 15, 12489 Berlin, GermanyInstitute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf e.V., Bautzner Landstr. 400, 01328 Dresden, GermanyAdvanced Instrumentation for Nano-Analytics (AINA), MRT Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422 Belvaux, LuxembourgA dedicated transmission helium ion microscope (THIM) for sub-50 keV helium has been constructed to investigate ion scattering processes and contrast mechanisms, aiding the development of new imaging and analysis modalities. Unlike a commercial helium ion microscope (HIM), the in-house built instrument allows full flexibility in experimental configuration. Here, we report projection imaging and intensity patterns obtained from powder and bulk crystalline samples using stationary broad-beam as well as convergent-beam illumination conditions in THIM. The He+ ions formed unexpected spot patterns in the far field for MgO, BN and NaCl powder samples, but not for Au-coated MgO. The origin of the spot patterns in these samples was investigated. Surface diffraction of ions was excluded as a possible cause because the recorded scattering angles do not correspond to the predicted Bragg angles. Complementary secondary electron (SE) imaging in the HIM revealed that these samples charge significantly under He+ ion irradiation. The spot patterns obtained in the THIM experiments are explained as artefacts related to sample charging. The results presented here indicate that factors other than channeling, blocking and surface diffraction of ions have an impact on the final intensity distribution in the far field. Hence, the different processes contributing to the final intensities will need to be understood in order to decouple and study the relevant ion-beam scattering and deflection phenomena.https://doi.org/10.3762/bjnano.10.160charginghelium ion microscopyion diffractionion scatteringtransmission ion microscopy |
| spellingShingle | Michael Mousley Santhana Eswara Olivier De Castro Olivier Bouton Nico Klingner Christoph T. Koch Gregor Hlawacek Tom Wirtz Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns Beilstein Journal of Nanotechnology charging helium ion microscopy ion diffraction ion scattering transmission ion microscopy |
| title | Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns |
| title_full | Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns |
| title_fullStr | Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns |
| title_full_unstemmed | Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns |
| title_short | Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns |
| title_sort | stationary beam full field transmission helium ion microscopy using sub 50 kev he projected images and intensity patterns |
| topic | charging helium ion microscopy ion diffraction ion scattering transmission ion microscopy |
| url | https://doi.org/10.3762/bjnano.10.160 |
| work_keys_str_mv | AT michaelmousley stationarybeamfullfieldtransmissionheliumionmicroscopyusingsub50kevheprojectedimagesandintensitypatterns AT santhanaeswara stationarybeamfullfieldtransmissionheliumionmicroscopyusingsub50kevheprojectedimagesandintensitypatterns AT olivierdecastro stationarybeamfullfieldtransmissionheliumionmicroscopyusingsub50kevheprojectedimagesandintensitypatterns AT olivierbouton stationarybeamfullfieldtransmissionheliumionmicroscopyusingsub50kevheprojectedimagesandintensitypatterns AT nicoklingner stationarybeamfullfieldtransmissionheliumionmicroscopyusingsub50kevheprojectedimagesandintensitypatterns AT christophtkoch stationarybeamfullfieldtransmissionheliumionmicroscopyusingsub50kevheprojectedimagesandintensitypatterns AT gregorhlawacek stationarybeamfullfieldtransmissionheliumionmicroscopyusingsub50kevheprojectedimagesandintensitypatterns AT tomwirtz stationarybeamfullfieldtransmissionheliumionmicroscopyusingsub50kevheprojectedimagesandintensitypatterns |