Stationary beam full-field transmission helium ion microscopy using sub-50 keV He+: Projected images and intensity patterns
A dedicated transmission helium ion microscope (THIM) for sub-50 keV helium has been constructed to investigate ion scattering processes and contrast mechanisms, aiding the development of new imaging and analysis modalities. Unlike a commercial helium ion microscope (HIM), the in-house built instrum...
Main Authors: | Michael Mousley, Santhana Eswara, Olivier De Castro, Olivier Bouton, Nico Klingner, Christoph T. Koch, Gregor Hlawacek, Tom Wirtz |
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Format: | Article |
Language: | English |
Published: |
Beilstein-Institut
2019-08-01
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Series: | Beilstein Journal of Nanotechnology |
Subjects: | |
Online Access: | https://doi.org/10.3762/bjnano.10.160 |
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