Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm
During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes their metrological properties for fast roughness and...
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MDPI AG
2019-03-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/19/6/1410 |
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| author | Uwe Brand Min Xu Lutz Doering Jannick Langfahl-Klabes Heinrich Behle Sebastian Bütefisch Thomas Ahbe Erwin Peiner Stefan Völlmeke Thomas Frank Bodo Mickan Ilia Kiselev Michael Hauptmannl Michael Drexel |
| author_facet | Uwe Brand Min Xu Lutz Doering Jannick Langfahl-Klabes Heinrich Behle Sebastian Bütefisch Thomas Ahbe Erwin Peiner Stefan Völlmeke Thomas Frank Bodo Mickan Ilia Kiselev Michael Hauptmannl Michael Drexel |
| author_sort | Uwe Brand |
| collection | DOAJ |
| description | During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes their metrological properties for fast roughness and shape measurements including noise, damping, tip form, tip wear, and probing forces and presents the first results on the measurement of mechanical surface parameters. Due to the small mass of the cantilever microprobes, roughness measurements at very high traverse speeds up to 15 mm/s are possible. At these high scanning speeds, considerable wear of the integrated silicon tips was observed in the past. In this paper, a new tip-testing artefact with rectangular grooves of different width was used to measure this wear and to measure the tip shape, which is needed for morphological filtering of the measured profiles and, thus, for accurate form measurements. To reduce tip wear, the integrated silicon tips were replaced by low-wear spherical diamond tips of a 2 µm radius. Currently, a compact microprobe device with an integrated feed-unit is being developed for high-speed roughness measurements on manufacturing machines. First measurements on sinusoidal artefacts were carried out successfully. Moreover, the first measurements of the elastic modulus of a polymer surface applying the contact resonance measurement principle are presented, which indicates the high potential of these microprobes for simultaneous high-speed roughness and mechanical parameter measurements. |
| first_indexed | 2024-12-10T07:54:01Z |
| format | Article |
| id | doaj.art-9c4464a37bcd4b0fb7c469f6a5ae3845 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-12-10T07:54:01Z |
| publishDate | 2019-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-9c4464a37bcd4b0fb7c469f6a5ae38452022-12-22T01:56:58ZengMDPI AGSensors1424-82202019-03-01196141010.3390/s19061410s19061410Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µmUwe Brand0Min Xu1Lutz Doering2Jannick Langfahl-Klabes3Heinrich Behle4Sebastian Bütefisch5Thomas Ahbe6Erwin Peiner7Stefan Völlmeke8Thomas Frank9Bodo Mickan10Ilia Kiselev11Michael Hauptmannl12Michael Drexel13Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Hans-Sommer-Straße 66, D-38106 Braunschweig, GermanyCiS Forschungsinstitut für Mikrosensorik GmbH, Konrad-Zuse-Straße 14, D-99099 Erfurt, GermanyCiS Forschungsinstitut für Mikrosensorik GmbH, Konrad-Zuse-Straße 14, D-99099 Erfurt, GermanyPhysikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, D-38116 Braunschweig, GermanyBreitmeier Messtechnik GmbH, Englerstr. 24, D-76275 Ettlingen, GermanyBreitmeier Messtechnik GmbH, Englerstr. 24, D-76275 Ettlingen, GermanyBreitmeier Messtechnik GmbH, Englerstr. 24, D-76275 Ettlingen, GermanyDuring the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes their metrological properties for fast roughness and shape measurements including noise, damping, tip form, tip wear, and probing forces and presents the first results on the measurement of mechanical surface parameters. Due to the small mass of the cantilever microprobes, roughness measurements at very high traverse speeds up to 15 mm/s are possible. At these high scanning speeds, considerable wear of the integrated silicon tips was observed in the past. In this paper, a new tip-testing artefact with rectangular grooves of different width was used to measure this wear and to measure the tip shape, which is needed for morphological filtering of the measured profiles and, thus, for accurate form measurements. To reduce tip wear, the integrated silicon tips were replaced by low-wear spherical diamond tips of a 2 µm radius. Currently, a compact microprobe device with an integrated feed-unit is being developed for high-speed roughness measurements on manufacturing machines. First measurements on sinusoidal artefacts were carried out successfully. Moreover, the first measurements of the elastic modulus of a polymer surface applying the contact resonance measurement principle are presented, which indicates the high potential of these microprobes for simultaneous high-speed roughness and mechanical parameter measurements.https://www.mdpi.com/1424-8220/19/6/1410cantilever microprobehigh-speedcontact resonancetip wearpiezo-resistivemechanical dampingtip-testing standard |
| spellingShingle | Uwe Brand Min Xu Lutz Doering Jannick Langfahl-Klabes Heinrich Behle Sebastian Bütefisch Thomas Ahbe Erwin Peiner Stefan Völlmeke Thomas Frank Bodo Mickan Ilia Kiselev Michael Hauptmannl Michael Drexel Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm Sensors cantilever microprobe high-speed contact resonance tip wear piezo-resistive mechanical damping tip-testing standard |
| title | Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm |
| title_full | Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm |
| title_fullStr | Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm |
| title_full_unstemmed | Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm |
| title_short | Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm |
| title_sort | long slender piezo resistive silicon microprobes for fast measurements of roughness and mechanical properties inside micro holes with diameters below 100 µm |
| topic | cantilever microprobe high-speed contact resonance tip wear piezo-resistive mechanical damping tip-testing standard |
| url | https://www.mdpi.com/1424-8220/19/6/1410 |
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