Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm

During the past decade, piezo-resistive cantilever type silicon microprobes for high-speed roughness measurements inside high-aspect-ratio microstructures, like injection nozzles or critical gas nozzles have been developed. This article summarizes their metrological properties for fast roughness and...

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Bibliographic Details
Main Authors: Uwe Brand, Min Xu, Lutz Doering, Jannick Langfahl-Klabes, Heinrich Behle, Sebastian Bütefisch, Thomas Ahbe, Erwin Peiner, Stefan Völlmeke, Thomas Frank, Bodo Mickan, Ilia Kiselev, Michael Hauptmannl, Michael Drexel
Format: Article
Language:English
Published: MDPI AG 2019-03-01
Series:Sensors
Subjects:
cantilever microprobe
high-speed
contact resonance
tip wear
piezo-resistive
mechanical damping
tip-testing standard
Online Access:https://www.mdpi.com/1424-8220/19/6/1410

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