Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor

Research Progress on Coating of Sensitive Materials for Micro-Hotplate Gas Sensor

Micro-hotplate gas sensors are widely used in air quality monitoring, identification of hazardous chemicals, human health monitoring, and other fields due to their advantages of small size, low power consumption, excellent consistency, and fast response speed. The micro-hotplate gas sensor comprises...

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Bibliographic Details
Main Authors:	Zhenyu Yuan, Fan Yang, Fanli Meng
Format:	Article
Language:	English
Published:	MDPI AG 2022-03-01
Series:	Micromachines
Subjects:	MEMS micro-hotplate gas sensor sensitive material coating
Online Access:	https://www.mdpi.com/2072-666X/13/3/491

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