Thin-Entrance Window Process for Soft X-Ray Sensors

Thin-Entrance Window Process for Soft X-Ray Sensors

New free electron lasers, such as SLAC’s LCLS-II, will provide unique scientific imaging opportunities. In order to fully utilize these facilities, we need to develop detectors with shallow entrance windows that will enable detection of soft x-rays from 250 eV to 1.5 KeV. Achieving adequately shallo...

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Bibliographic Details
Main Authors:	Julie Segal, Christopher Kenney, Jeffrey M. Kowalski, Jeffrey E. Kowalski, Gabriel Blaj, Lisa Rozario, Jasmin Hasi, Angelo Dragone, Pietro Caragiulo, Lorenzo Rota
Format:	Article
Language:	English
Published:	Frontiers Media S.A. 2021-03-01
Series:	Frontiers in Physics
Subjects:	silicon sensors x-ray sensors micro-wave anneal soft x-rays silicon processing
Online Access:	https://www.frontiersin.org/articles/10.3389/fphy.2021.618390/full

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