On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry
This paper investigates how the electromechanical response of MEMS/NEMS devices changes when the geometrical characteristics of their embedded flexural hinges are modified. The research is dedicated particularly to MEMS/NEMS devices which are actuated by means of rotary comb-drives. The electromecha...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-12-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/14/12/2229 |
| _version_ | 1797379997944512512 |
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| author | Alessio Buzzin Lorenzo Giannini Gabriele Bocchetta Andrea Notargiacomo Ennio Giovine Andrea Scorza Rita Asquini Giampiero de Cesare Nicola Pio Belfiore |
| author_facet | Alessio Buzzin Lorenzo Giannini Gabriele Bocchetta Andrea Notargiacomo Ennio Giovine Andrea Scorza Rita Asquini Giampiero de Cesare Nicola Pio Belfiore |
| author_sort | Alessio Buzzin |
| collection | DOAJ |
| description | This paper investigates how the electromechanical response of MEMS/NEMS devices changes when the geometrical characteristics of their embedded flexural hinges are modified. The research is dedicated particularly to MEMS/NEMS devices which are actuated by means of rotary comb-drives. The electromechanical behavior of a chosen rotary device is assessed by studying the rotation of the end effector, the motion of the comb-drive mobile fingers, the actuator’s maximum operating voltage, and the stress sustained by the flexure when the flexure’s shape, length, and width change. The results are compared with the behavior of a standard revolute joint. Outcomes demonstrate that a linear flexible beam cannot perfectly replace the revolute joint as it induces a translation that strongly facilitates the pull-in phenomenon and significantly increases the risk of ruptures of the comb-drives. On the other hand, results show how curved beams provide a motion that better resembles the revolute motion, preserving the structural integrity of the device and avoiding the pull-in phenomenon. Finally, results also show that the end effector motion approaches most precisely the revolute motion when a fine tuning of the beam’s length and width is performed. |
| first_indexed | 2024-03-08T20:32:06Z |
| format | Article |
| id | doaj.art-9e2daef657854ab7bd5d36c487eae45b |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-08T20:32:06Z |
| publishDate | 2023-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-9e2daef657854ab7bd5d36c487eae45b2023-12-22T14:25:28ZengMDPI AGMicromachines2072-666X2023-12-011412222910.3390/mi14122229On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ GeometryAlessio Buzzin0Lorenzo Giannini1Gabriele Bocchetta2Andrea Notargiacomo3Ennio Giovine4Andrea Scorza5Rita Asquini6Giampiero de Cesare7Nicola Pio Belfiore8Department of Information Engineering, Electronics and Telecommunications, Sapienza University of Rome, Via Eudossiana 18, 00184 Rome, ItalyDepartment of Information Engineering, Electronics and Telecommunications, Sapienza University of Rome, Via Eudossiana 18, 00184 Rome, ItalyDepartment of Industrial, Electronic and Mechanical Engineering, Roma Tre University, Via Della Vasca Navale 79, 00146 Rome, ItalyInstitute of Photonics and Nanotechnologies, National Research Council IFN-CNR, Via Del Fosso Del Cavaliere 100, 00133 Rome, ItalyInstitute of Photonics and Nanotechnologies, National Research Council IFN-CNR, Via Del Fosso Del Cavaliere 100, 00133 Rome, ItalyDepartment of Industrial, Electronic and Mechanical Engineering, Roma Tre University, Via Della Vasca Navale 79, 00146 Rome, ItalyDepartment of Information Engineering, Electronics and Telecommunications, Sapienza University of Rome, Via Eudossiana 18, 00184 Rome, ItalyDepartment of Information Engineering, Electronics and Telecommunications, Sapienza University of Rome, Via Eudossiana 18, 00184 Rome, ItalyDepartment of Industrial, Electronic and Mechanical Engineering, Roma Tre University, Via Della Vasca Navale 79, 00146 Rome, ItalyThis paper investigates how the electromechanical response of MEMS/NEMS devices changes when the geometrical characteristics of their embedded flexural hinges are modified. The research is dedicated particularly to MEMS/NEMS devices which are actuated by means of rotary comb-drives. The electromechanical behavior of a chosen rotary device is assessed by studying the rotation of the end effector, the motion of the comb-drive mobile fingers, the actuator’s maximum operating voltage, and the stress sustained by the flexure when the flexure’s shape, length, and width change. The results are compared with the behavior of a standard revolute joint. Outcomes demonstrate that a linear flexible beam cannot perfectly replace the revolute joint as it induces a translation that strongly facilitates the pull-in phenomenon and significantly increases the risk of ruptures of the comb-drives. On the other hand, results show how curved beams provide a motion that better resembles the revolute motion, preserving the structural integrity of the device and avoiding the pull-in phenomenon. Finally, results also show that the end effector motion approaches most precisely the revolute motion when a fine tuning of the beam’s length and width is performed.https://www.mdpi.com/2072-666X/14/12/2229MEMSNEMScomb-driveselectrostatic actuatorflexure hingecompliant |
| spellingShingle | Alessio Buzzin Lorenzo Giannini Gabriele Bocchetta Andrea Notargiacomo Ennio Giovine Andrea Scorza Rita Asquini Giampiero de Cesare Nicola Pio Belfiore On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry Micromachines MEMS NEMS comb-drives electrostatic actuator flexure hinge compliant |
| title | On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry |
| title_full | On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry |
| title_fullStr | On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry |
| title_full_unstemmed | On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry |
| title_short | On the Dependency of the Electromechanical Response of Rotary MEMS/NEMS on Their Embedded Flexure Hinges’ Geometry |
| title_sort | on the dependency of the electromechanical response of rotary mems nems on their embedded flexure hinges geometry |
| topic | MEMS NEMS comb-drives electrostatic actuator flexure hinge compliant |
| url | https://www.mdpi.com/2072-666X/14/12/2229 |
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