Mid-infrared materials and devices on a Si platform for optical sensing
In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNx...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2014-01-01
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| Series: | Science and Technology of Advanced Materials |
| Online Access: | http://dx.doi.org/10.1088/1468-6996/15/1/014603 |
| _version_ | 1828434315359289344 |
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| author | Vivek Singh et al. |
| author_facet | Vivek Singh et al. |
| author_sort | Vivek Singh |
| collection | DOAJ |
| description | In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNx waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors. |
| first_indexed | 2024-12-10T18:48:31Z |
| format | Article |
| id | doaj.art-9e44db34eec64e4b8f66cda115ccdcf7 |
| institution | Directory Open Access Journal |
| issn | 1468-6996 1878-5514 |
| language | English |
| last_indexed | 2024-12-10T18:48:31Z |
| publishDate | 2014-01-01 |
| publisher | Taylor & Francis Group |
| record_format | Article |
| series | Science and Technology of Advanced Materials |
| spelling | doaj.art-9e44db34eec64e4b8f66cda115ccdcf72022-12-22T01:37:25ZengTaylor & Francis GroupScience and Technology of Advanced Materials1468-69961878-55142014-01-0115101460310.1088/1468-6996/15/1/014603Mid-infrared materials and devices on a Si platform for optical sensingVivek Singhet al.In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNx waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.http://dx.doi.org/10.1088/1468-6996/15/1/014603 |
| spellingShingle | Vivek Singh et al. Mid-infrared materials and devices on a Si platform for optical sensing Science and Technology of Advanced Materials |
| title | Mid-infrared materials and devices on a Si platform for optical sensing |
| title_full | Mid-infrared materials and devices on a Si platform for optical sensing |
| title_fullStr | Mid-infrared materials and devices on a Si platform for optical sensing |
| title_full_unstemmed | Mid-infrared materials and devices on a Si platform for optical sensing |
| title_short | Mid-infrared materials and devices on a Si platform for optical sensing |
| title_sort | mid infrared materials and devices on a si platform for optical sensing |
| url | http://dx.doi.org/10.1088/1468-6996/15/1/014603 |
| work_keys_str_mv | AT viveksingh midinfraredmaterialsanddevicesonasiplatformforopticalsensing AT etal midinfraredmaterialsanddevicesonasiplatformforopticalsensing |