A Bi-Directional Acoustic Micropump Driven by Oscillating Sharp-Edge Structures
This paper proposes a bi-directional acoustic micropump driven by two groups of oscillating sharp-edge structures: one group of sharp-edge structures with inclined angles of 60° and a width of 40 μm, and another group with inclined angles of 45° and a width of 25 μm. One of the groups of sharp-edge...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-04-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/4/860 |