From zirconia to yttria: Sampling the YSZ phase diagram using sputter-deposited thin films
Yttria-stabilized zirconia (YSZ) thin films with varying composition between 3 mol% and 40 mol% have been prepared by direct-current ion beam sputtering at a substrate temperature of 300 °C, with ideal transfer of the stoichiometry from the target to the thin film and a high degree of homogeneity, a...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2016-02-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.4942818 |
| _version_ | 1818267636577861632 |
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| author | Thomas Götsch Wolfgang Wallisch Michael Stöger-Pollach Bernhard Klötzer Simon Penner |
| author_facet | Thomas Götsch Wolfgang Wallisch Michael Stöger-Pollach Bernhard Klötzer Simon Penner |
| author_sort | Thomas Götsch |
| collection | DOAJ |
| description | Yttria-stabilized zirconia (YSZ) thin films with varying composition between 3 mol% and 40 mol% have been prepared by direct-current ion beam sputtering at a substrate temperature of 300 °C, with ideal transfer of the stoichiometry from the target to the thin film and a high degree of homogeneity, as determined by X-ray photoelectron and energy-dispersive X-ray spectroscopy. The films were analyzed using transmission electron microscopy, revealing that, while the films with 8 mol% and 20 mol% yttria retain their crystal structure from the bulk compound (tetragonal and cubic, respectively), those with 3 mol% and 40 mol% Y2O3 undergo a phase transition upon sputtering (from a tetragonal/monoclinic mixture to purely tetragonal YSZ, and from a rhombohedral structure to a cubic one, respectively). Selected area electron diffraction shows a strong texturing for the three samples with lower yttria-content, while the one with 40 mol% Y2O3 is fully disordered, owing to the phase transition. Additionally, AFM topology images show somewhat similar structures up to 20 mol% yttria, while the specimen with the highest amount of dopant features a lower roughness. In order to facilitate the discussion of the phases present for each sample, a thorough review of previously published phase diagrams is presented. |
| first_indexed | 2024-12-12T20:25:45Z |
| format | Article |
| id | doaj.art-9f5f260e0c2342d283a2aa3288113e9f |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-12-12T20:25:45Z |
| publishDate | 2016-02-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-9f5f260e0c2342d283a2aa3288113e9f2022-12-22T00:13:10ZengAIP Publishing LLCAIP Advances2158-32262016-02-0162025119025119-2010.1063/1.4942818076602ADVFrom zirconia to yttria: Sampling the YSZ phase diagram using sputter-deposited thin filmsThomas Götsch0Wolfgang Wallisch1Michael Stöger-Pollach2Bernhard Klötzer3Simon Penner4Institute of Physical Chemistry, University of Innsbruck, Innrain 80/82, A-6020 Innsbruck, AustriaUniversity Service Center for Transmission Electron Microscopy (USTEM), Vienna University of Technology, Wiedner Hauptstraße 8–10, A-1040 Vienna, AustriaUniversity Service Center for Transmission Electron Microscopy (USTEM), Vienna University of Technology, Wiedner Hauptstraße 8–10, A-1040 Vienna, AustriaInstitute of Physical Chemistry, University of Innsbruck, Innrain 80/82, A-6020 Innsbruck, AustriaInstitute of Physical Chemistry, University of Innsbruck, Innrain 80/82, A-6020 Innsbruck, AustriaYttria-stabilized zirconia (YSZ) thin films with varying composition between 3 mol% and 40 mol% have been prepared by direct-current ion beam sputtering at a substrate temperature of 300 °C, with ideal transfer of the stoichiometry from the target to the thin film and a high degree of homogeneity, as determined by X-ray photoelectron and energy-dispersive X-ray spectroscopy. The films were analyzed using transmission electron microscopy, revealing that, while the films with 8 mol% and 20 mol% yttria retain their crystal structure from the bulk compound (tetragonal and cubic, respectively), those with 3 mol% and 40 mol% Y2O3 undergo a phase transition upon sputtering (from a tetragonal/monoclinic mixture to purely tetragonal YSZ, and from a rhombohedral structure to a cubic one, respectively). Selected area electron diffraction shows a strong texturing for the three samples with lower yttria-content, while the one with 40 mol% Y2O3 is fully disordered, owing to the phase transition. Additionally, AFM topology images show somewhat similar structures up to 20 mol% yttria, while the specimen with the highest amount of dopant features a lower roughness. In order to facilitate the discussion of the phases present for each sample, a thorough review of previously published phase diagrams is presented.http://dx.doi.org/10.1063/1.4942818 |
| spellingShingle | Thomas Götsch Wolfgang Wallisch Michael Stöger-Pollach Bernhard Klötzer Simon Penner From zirconia to yttria: Sampling the YSZ phase diagram using sputter-deposited thin films AIP Advances |
| title | From zirconia to yttria: Sampling the YSZ phase diagram using sputter-deposited thin films |
| title_full | From zirconia to yttria: Sampling the YSZ phase diagram using sputter-deposited thin films |
| title_fullStr | From zirconia to yttria: Sampling the YSZ phase diagram using sputter-deposited thin films |
| title_full_unstemmed | From zirconia to yttria: Sampling the YSZ phase diagram using sputter-deposited thin films |
| title_short | From zirconia to yttria: Sampling the YSZ phase diagram using sputter-deposited thin films |
| title_sort | from zirconia to yttria sampling the ysz phase diagram using sputter deposited thin films |
| url | http://dx.doi.org/10.1063/1.4942818 |
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