Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method

The oscillation of the sense mode of the micro-machined Coriolis vibratory gyroscope (MCVG) with high quality factor (Q) is analyzed in this study and the corresponding force feedback control scheme is presented to suppress this oscillation. The controller consists of integrator and some filters, in...

Full description

Bibliographic Details
Main Authors: Qiang Shen, Xinpeng Wang, Yixuan Wu, Jianbing Xie
Format: Article
Language:English
Published: MDPI AG 2018-07-01
Series:Sensors
Subjects:
Online Access:http://www.mdpi.com/1424-8220/18/8/2443
_version_ 1811263056781508608
author Qiang Shen
Xinpeng Wang
Yixuan Wu
Jianbing Xie
author_facet Qiang Shen
Xinpeng Wang
Yixuan Wu
Jianbing Xie
author_sort Qiang Shen
collection DOAJ
description The oscillation of the sense mode of the micro-machined Coriolis vibratory gyroscope (MCVG) with high quality factor (Q) is analyzed in this study and the corresponding force feedback control scheme is presented to suppress this oscillation. The controller consists of integrator and some filters, instead of the common but complicated demodulation and remodulation modules. Compared with using no oscillation suppression scheme, the proposed simplified oscillation suppression control scheme can achieve an improvement of the sense mode of the MCVG. The inband spectrum ripple of the angular rate output are improved from 51.4 dB to 4.23 × 10−4 dB. Correspondingly, these two performance parameters are improved by 370.4 and 186.2 times, which are higher than two orders of magnitude, respectively. Bias stability is improved from 9.72 deg/h to 2.5 deg/h. Test results prove that the proposed control scheme is effective in suppressing the oscillation.
first_indexed 2024-04-12T19:38:00Z
format Article
id doaj.art-9f76dc99c7874e5c87c7527826d62de9
institution Directory Open Access Journal
issn 1424-8220
language English
last_indexed 2024-04-12T19:38:00Z
publishDate 2018-07-01
publisher MDPI AG
record_format Article
series Sensors
spelling doaj.art-9f76dc99c7874e5c87c7527826d62de92022-12-22T03:19:10ZengMDPI AGSensors1424-82202018-07-01188244310.3390/s18082443s18082443Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control MethodQiang Shen0Xinpeng Wang1Yixuan Wu2Jianbing Xie3Research & Development Institute, Northwestern Polytechnical University, Shenzhen 518057, ChinaResearch & Development Institute, Northwestern Polytechnical University, Shenzhen 518057, ChinaResearch & Development Institute, Northwestern Polytechnical University, Shenzhen 518057, ChinaResearch & Development Institute, Northwestern Polytechnical University, Shenzhen 518057, ChinaThe oscillation of the sense mode of the micro-machined Coriolis vibratory gyroscope (MCVG) with high quality factor (Q) is analyzed in this study and the corresponding force feedback control scheme is presented to suppress this oscillation. The controller consists of integrator and some filters, instead of the common but complicated demodulation and remodulation modules. Compared with using no oscillation suppression scheme, the proposed simplified oscillation suppression control scheme can achieve an improvement of the sense mode of the MCVG. The inband spectrum ripple of the angular rate output are improved from 51.4 dB to 4.23 × 10−4 dB. Correspondingly, these two performance parameters are improved by 370.4 and 186.2 times, which are higher than two orders of magnitude, respectively. Bias stability is improved from 9.72 deg/h to 2.5 deg/h. Test results prove that the proposed control scheme is effective in suppressing the oscillation.http://www.mdpi.com/1424-8220/18/8/2443MEMS gyroscopesense-mode oscillation suppressioncontrol circuit
spellingShingle Qiang Shen
Xinpeng Wang
Yixuan Wu
Jianbing Xie
Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method
Sensors
MEMS gyroscope
sense-mode oscillation suppression
control circuit
title Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method
title_full Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method
title_fullStr Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method
title_full_unstemmed Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method
title_short Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method
title_sort oscillation suppression in the sense mode of a high q mems gyroscope using a simplified closed loop control method
topic MEMS gyroscope
sense-mode oscillation suppression
control circuit
url http://www.mdpi.com/1424-8220/18/8/2443
work_keys_str_mv AT qiangshen oscillationsuppressioninthesensemodeofahighqmemsgyroscopeusingasimplifiedclosedloopcontrolmethod
AT xinpengwang oscillationsuppressioninthesensemodeofahighqmemsgyroscopeusingasimplifiedclosedloopcontrolmethod
AT yixuanwu oscillationsuppressioninthesensemodeofahighqmemsgyroscopeusingasimplifiedclosedloopcontrolmethod
AT jianbingxie oscillationsuppressioninthesensemodeofahighqmemsgyroscopeusingasimplifiedclosedloopcontrolmethod