Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer
This paper presents a bistable microswitch fully batch-fabricated on a single glass wafer, comprising of a microactuator, a signal transformer, a microspring and a permanent magnet. The bistable mechanism of the microswitch with large displacement of 160 μm depends on the balance of the magnetic for...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2016-05-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/16/5/634 |
| _version_ | 1798041346645164032 |
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| author | Xiaodan Miao Xuhan Dai Yi Huang Guifu Ding Xiaolin Zhao |
| author_facet | Xiaodan Miao Xuhan Dai Yi Huang Guifu Ding Xiaolin Zhao |
| author_sort | Xiaodan Miao |
| collection | DOAJ |
| description | This paper presents a bistable microswitch fully batch-fabricated on a single glass wafer, comprising of a microactuator, a signal transformer, a microspring and a permanent magnet. The bistable mechanism of the microswitch with large displacement of 160 μm depends on the balance of the magnetic force and elastic force. Both the magnetic force and elastic force were optimized by finite-element simulation to predict the reliable of the device. The prototype was fabricated and characterized. By utilizing thick laminated photoresist sacrificial layer, the large displacement was obtained to ensure the insulation of the microswitch. The testing results show that the microswitch realized the bistable mechanism at a 3–5 V input voltage and closed in 0.96 ms, which verified the simulation. |
| first_indexed | 2024-04-11T22:20:16Z |
| format | Article |
| id | doaj.art-9f8c97d74f2a4d1881a296334533e0a3 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T22:20:16Z |
| publishDate | 2016-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-9f8c97d74f2a4d1881a296334533e0a32022-12-22T04:00:10ZengMDPI AGSensors1424-82202016-05-0116563410.3390/s16050634s16050634Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single WaferXiaodan Miao0Xuhan Dai1Yi Huang2Guifu Ding3Xiaolin Zhao4College of Mechanical Engineering, Shanghai University of Engineering Science, Shanghai 201620, ChinaNational Key Laboratory of Micro/Nano Fabrication Technology, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, ChinaNational Key Laboratory of Micro/Nano Fabrication Technology, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, ChinaNational Key Laboratory of Micro/Nano Fabrication Technology, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, ChinaNational Key Laboratory of Micro/Nano Fabrication Technology, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, ChinaThis paper presents a bistable microswitch fully batch-fabricated on a single glass wafer, comprising of a microactuator, a signal transformer, a microspring and a permanent magnet. The bistable mechanism of the microswitch with large displacement of 160 μm depends on the balance of the magnetic force and elastic force. Both the magnetic force and elastic force were optimized by finite-element simulation to predict the reliable of the device. The prototype was fabricated and characterized. By utilizing thick laminated photoresist sacrificial layer, the large displacement was obtained to ensure the insulation of the microswitch. The testing results show that the microswitch realized the bistable mechanism at a 3–5 V input voltage and closed in 0.96 ms, which verified the simulation.http://www.mdpi.com/1424-8220/16/5/634MEMSmicroswitchmagneticlarge displacementmicrofabrication |
| spellingShingle | Xiaodan Miao Xuhan Dai Yi Huang Guifu Ding Xiaolin Zhao Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer Sensors MEMS microswitch magnetic large displacement microfabrication |
| title | Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer |
| title_full | Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer |
| title_fullStr | Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer |
| title_full_unstemmed | Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer |
| title_short | Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer |
| title_sort | large out of plane displacement bistable electromagnetic microswitch on a single wafer |
| topic | MEMS microswitch magnetic large displacement microfabrication |
| url | http://www.mdpi.com/1424-8220/16/5/634 |
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