Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection

Fabrication of Silicon Nanowire Sensors for Highly Sensitive pH and DNA Hybridization Detection

A highly sensitive silicon nanowire (SiNW)-based sensor device was developed using electron beam lithography integrated with complementary metal oxide semiconductor (CMOS) technology. The top-down fabrication approach enables the rapid fabrication of device miniaturization with uniform and strictly...

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Bibliographic Details
Main Authors: Siti Fatimah Abd Rahman, Nor Azah Yusof, Mohd Khairuddin Md Arshad, Uda Hashim, Mohammad Nuzaihan Md Nor, Mohd Nizar Hamidon
Format: Article
Language:English
Published: MDPI AG 2022-08-01
Series:Nanomaterials
Subjects:
silicon nanowire
biosensor
pH
DNA hybridization
electrical detection
Online Access:https://www.mdpi.com/2079-4991/12/15/2652

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