Suppression of Back-Reflection From the End Face of Si<sub>3</sub>N<sub>4</sub> Waveguide Resonator
Silicon nitride waveguide (Si<sub>3</sub>N<sub>4</sub>), is used as the most important sensitive device because of its excellent high-polarizing characteristics. It has the potential to build the miniaturized, high-precision resonant integrated optical gyroscope (RIOG) in rec...
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| Format: | Article |
| Language: | English |
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IEEE
2021-01-01
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| Series: | IEEE Access |
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| Online Access: | https://ieeexplore.ieee.org/document/9354769/ |
| _version_ | 1819175243757912064 |
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| author | Changkun Feng Danni Liu Peiren Ni Hui Li Lishuang Feng |
| author_facet | Changkun Feng Danni Liu Peiren Ni Hui Li Lishuang Feng |
| author_sort | Changkun Feng |
| collection | DOAJ |
| description | Silicon nitride waveguide (Si<sub>3</sub>N<sub>4</sub>), is used as the most important sensitive device because of its excellent high-polarizing characteristics. It has the potential to build the miniaturized, high-precision resonant integrated optical gyroscope (RIOG) in recent years. However, the back-reflection caused by the refractive index difference between the Si<sub>3</sub>N<sub>4</sub> waveguide and the pigtail fiber has a non-negligible impact on the accuracy of the gyroscope. In this paper, we propose a method to suppress the back-reflection of the end face of the Si<sub>3</sub>N<sub>4</sub> waveguide resonator. We use the Fimmprop module of the simulation software Photon Design to simulate the relationship between the back-reflection coefficient of Si<sub>3</sub>N<sub>4</sub> waveguide and different tilt angles. The simulation result shows that when the end face of the Si<sub>3</sub>N<sub>4</sub> waveguide is oblique cut by 15°, the back-reflection is the minimum, about -67 dB. The back-reflection obtained through the experiments are about -65 dB, consistent with the simulation result. Together, our data suggested that the back-reflection noise of the Si<sub>3</sub>N<sub>4</sub> can be suppressed by the oblique cutting of the end face by 15°. The conclusion can lay a foundation for improving the performance of RIOG based on Si<sub>3</sub>N<sub>4</sub> waveguide resonator. |
| first_indexed | 2024-12-22T20:51:46Z |
| format | Article |
| id | doaj.art-9ff697f7f8214befaf3e21741dd428ef |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-12-22T20:51:46Z |
| publishDate | 2021-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-9ff697f7f8214befaf3e21741dd428ef2022-12-21T18:13:04ZengIEEEIEEE Access2169-35362021-01-019288972890310.1109/ACCESS.2021.30597469354769Suppression of Back-Reflection From the End Face of Si<sub>3</sub>N<sub>4</sub> Waveguide ResonatorChangkun Feng0https://orcid.org/0000-0001-6659-5586Danni Liu1https://orcid.org/0000-0002-1340-4835Peiren Ni2https://orcid.org/0000-0002-1849-3654Hui Li3https://orcid.org/0000-0002-1525-8413Lishuang Feng4https://orcid.org/0000-0002-0714-0976Key Laboratory of Micro-nano Measurement, Manipulation and Physics (Ministry of Education), Beihang University, Beijing, ChinaKey Laboratory of Micro-nano Measurement, Manipulation and Physics (Ministry of Education), Beihang University, Beijing, ChinaKey Laboratory of Micro-nano Measurement, Manipulation and Physics (Ministry of Education), Beihang University, Beijing, ChinaKey Laboratory of Micro-nano Measurement, Manipulation and Physics (Ministry of Education), Beihang University, Beijing, ChinaKey Laboratory of Micro-nano Measurement, Manipulation and Physics (Ministry of Education), Beihang University, Beijing, ChinaSilicon nitride waveguide (Si<sub>3</sub>N<sub>4</sub>), is used as the most important sensitive device because of its excellent high-polarizing characteristics. It has the potential to build the miniaturized, high-precision resonant integrated optical gyroscope (RIOG) in recent years. However, the back-reflection caused by the refractive index difference between the Si<sub>3</sub>N<sub>4</sub> waveguide and the pigtail fiber has a non-negligible impact on the accuracy of the gyroscope. In this paper, we propose a method to suppress the back-reflection of the end face of the Si<sub>3</sub>N<sub>4</sub> waveguide resonator. We use the Fimmprop module of the simulation software Photon Design to simulate the relationship between the back-reflection coefficient of Si<sub>3</sub>N<sub>4</sub> waveguide and different tilt angles. The simulation result shows that when the end face of the Si<sub>3</sub>N<sub>4</sub> waveguide is oblique cut by 15°, the back-reflection is the minimum, about -67 dB. The back-reflection obtained through the experiments are about -65 dB, consistent with the simulation result. Together, our data suggested that the back-reflection noise of the Si<sub>3</sub>N<sub>4</sub> can be suppressed by the oblique cutting of the end face by 15°. The conclusion can lay a foundation for improving the performance of RIOG based on Si<sub>3</sub>N<sub>4</sub> waveguide resonator.https://ieeexplore.ieee.org/document/9354769/Back-reflectionintegrated optical gyroscopesoblique cutsilicon nitride waveguides |
| spellingShingle | Changkun Feng Danni Liu Peiren Ni Hui Li Lishuang Feng Suppression of Back-Reflection From the End Face of Si<sub>3</sub>N<sub>4</sub> Waveguide Resonator IEEE Access Back-reflection integrated optical gyroscopes oblique cut silicon nitride waveguides |
| title | Suppression of Back-Reflection From the End Face of Si<sub>3</sub>N<sub>4</sub> Waveguide Resonator |
| title_full | Suppression of Back-Reflection From the End Face of Si<sub>3</sub>N<sub>4</sub> Waveguide Resonator |
| title_fullStr | Suppression of Back-Reflection From the End Face of Si<sub>3</sub>N<sub>4</sub> Waveguide Resonator |
| title_full_unstemmed | Suppression of Back-Reflection From the End Face of Si<sub>3</sub>N<sub>4</sub> Waveguide Resonator |
| title_short | Suppression of Back-Reflection From the End Face of Si<sub>3</sub>N<sub>4</sub> Waveguide Resonator |
| title_sort | suppression of back reflection from the end face of si sub 3 sub n sub 4 sub waveguide resonator |
| topic | Back-reflection integrated optical gyroscopes oblique cut silicon nitride waveguides |
| url | https://ieeexplore.ieee.org/document/9354769/ |
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