Bayesian estimation for XPS spectral analysis at multiple core levels

X-ray photoelectron spectroscopy (XPS) is a widely used measurement technique in material surface analysis, but its analysis is subject to operator arbitrariness in the results. In a previous paper, a method based on genetic algorithms was proposed to estimate the composition ratios of compounds fro...

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Bibliographic Details
Main Authors: Atsushi Machida, Kenji Nagata, Ryo Murakami, Hiroshi Shinotsuka, Hayaru Shouno, Hideki Yoshikawa, Masato Okada
Format: Article
Language:English
Published: Taylor & Francis Group 2021-01-01
Series:Science and Technology of Advanced Materials: Methods
Subjects:
Online Access:http://dx.doi.org/10.1080/27660400.2021.1943172