Coupled Cavity Mid-IR Quantum Cascade Lasers Fabricated by Dry Etching
In this work, two-section, coupled cavity, mid-IR quantum cascade lasers (QCLs) were characterized in terms of their tuning range and emission stability under operation towards potential application in detection systems. Devices were processed by inductively coupled plasma reactive ion etching (ICP-...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-07-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/7/3/45 |
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| author | Kamil Pierściński Dorota Pierścińska Aleksandr Kuźmicz Grzegorz Sobczak Maciej Bugajski Piotr Gutowski Krzysztof Chmielewski |
| author_facet | Kamil Pierściński Dorota Pierścińska Aleksandr Kuźmicz Grzegorz Sobczak Maciej Bugajski Piotr Gutowski Krzysztof Chmielewski |
| author_sort | Kamil Pierściński |
| collection | DOAJ |
| description | In this work, two-section, coupled cavity, mid-IR quantum cascade lasers (QCLs) were characterized in terms of their tuning range and emission stability under operation towards potential application in detection systems. Devices were processed by inductively coupled plasma reactive ion etching (ICP-RIE) from InP-based heterostructure, designed for emission in the 9.x micrometer range. Single mode devices were demonstrated with a better than 20 dB side mode suppression ratio (SMRS). The fabrication method resulted in improved yield, as well as high repeatability of individual devices. Continuous, mode-hop-free tuning of emission wavelength was observed across ~4.5 cm<sup>−1</sup> for the range of temperatures of the heat sink from 15 °C to 70 °C. Using the thermal perturbation in the lasing cavity, in conjunction with controlled hopping between coupled-cavity (CC) modes, we were able to accomplish tuning over the range of up to ~20 cm<sup>−1</sup>. |
| first_indexed | 2024-03-10T18:42:42Z |
| format | Article |
| id | doaj.art-a064a295e30346eeb861b612990b7e56 |
| institution | Directory Open Access Journal |
| issn | 2304-6732 |
| language | English |
| last_indexed | 2024-03-10T18:42:42Z |
| publishDate | 2020-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Photonics |
| spelling | doaj.art-a064a295e30346eeb861b612990b7e562023-11-20T05:45:09ZengMDPI AGPhotonics2304-67322020-07-01734510.3390/photonics7030045Coupled Cavity Mid-IR Quantum Cascade Lasers Fabricated by Dry EtchingKamil Pierściński0Dorota Pierścińska1Aleksandr Kuźmicz2Grzegorz Sobczak3Maciej Bugajski4Piotr Gutowski5Krzysztof Chmielewski6Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, PolandInstitute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, PolandInstitute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, PolandInstitute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, PolandInstitute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, PolandInstitute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, PolandInstitute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, PolandIn this work, two-section, coupled cavity, mid-IR quantum cascade lasers (QCLs) were characterized in terms of their tuning range and emission stability under operation towards potential application in detection systems. Devices were processed by inductively coupled plasma reactive ion etching (ICP-RIE) from InP-based heterostructure, designed for emission in the 9.x micrometer range. Single mode devices were demonstrated with a better than 20 dB side mode suppression ratio (SMRS). The fabrication method resulted in improved yield, as well as high repeatability of individual devices. Continuous, mode-hop-free tuning of emission wavelength was observed across ~4.5 cm<sup>−1</sup> for the range of temperatures of the heat sink from 15 °C to 70 °C. Using the thermal perturbation in the lasing cavity, in conjunction with controlled hopping between coupled-cavity (CC) modes, we were able to accomplish tuning over the range of up to ~20 cm<sup>−1</sup>.https://www.mdpi.com/2304-6732/7/3/45coupled cavityquantum cascade lasers (QCLs)dry etching |
| spellingShingle | Kamil Pierściński Dorota Pierścińska Aleksandr Kuźmicz Grzegorz Sobczak Maciej Bugajski Piotr Gutowski Krzysztof Chmielewski Coupled Cavity Mid-IR Quantum Cascade Lasers Fabricated by Dry Etching Photonics coupled cavity quantum cascade lasers (QCLs) dry etching |
| title | Coupled Cavity Mid-IR Quantum Cascade Lasers Fabricated by Dry Etching |
| title_full | Coupled Cavity Mid-IR Quantum Cascade Lasers Fabricated by Dry Etching |
| title_fullStr | Coupled Cavity Mid-IR Quantum Cascade Lasers Fabricated by Dry Etching |
| title_full_unstemmed | Coupled Cavity Mid-IR Quantum Cascade Lasers Fabricated by Dry Etching |
| title_short | Coupled Cavity Mid-IR Quantum Cascade Lasers Fabricated by Dry Etching |
| title_sort | coupled cavity mid ir quantum cascade lasers fabricated by dry etching |
| topic | coupled cavity quantum cascade lasers (QCLs) dry etching |
| url | https://www.mdpi.com/2304-6732/7/3/45 |
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