Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-ray Transparent Samples

Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-ray Transparent Samples

We employ xenon (Xe) plasma focused ion beam (PFIB) milling to obtain soft X-ray transparent windows out of bulk samples. The use of a Xe PFIB allows for the milling of thin windows (several 100 nm thick) with areas of the order of 100 µm × 100 µm into bulk substrates. In addition, we present an app...

Full description

Bibliographic Details
Main Authors: Sina Mayr, Simone Finizio, Joakim Reuteler, Stefan Stutz, Carsten Dubs, Markus Weigand, Aleš Hrabec, Jörg Raabe, Sebastian Wintz
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Crystals
Subjects:
Xe plasma focused ion beam
soft X-ray transparency
transmission X-ray microscopy
Online Access:https://www.mdpi.com/2073-4352/11/5/546

Internet

https://www.mdpi.com/2073-4352/11/5/546

Similar Items