INVESTIGATION OF POLARIZATION IN HETEROSTRUCTURES WITH THE QUANTUM WELL AlGaN / GaN USING CAPACITANCE-VOLTAGE CHARACTERISTICS

In the present study, the degree of relaxation of tension in the barrier layer of heterostructures AlGaN / GaN on the basis of measurements of the capacitance-voltage characteristics GaNHEMT is determined. Samples were grown on Al2O3 substrates by deposition of organometallic compounds from a gaseou...

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Bibliographic Details
Main Authors: O. A. Ruban, P. P. Maltsev
Format: Article
Language:Russian
Published: MIREA - Russian Technological University 2016-10-01
Series:Российский технологический журнал
Subjects:
Online Access:https://www.rtj-mirea.ru/jour/article/view/35