Enhancement of Withstand Voltage in Silicon Strain Gauges Using a Thin Alkali-Free Glass
We present a cost-effective approach to produce silicon strain gauges that can withstand very high voltage without using any complex package design and without sacrificing any sensor performance. This is achieved by a special silicon strain gauge structure created on an alkali-free glass substrate t...
Main Authors: | Joon Hyub Kim, Ji-Hoon Han, Chan Won Park, Nam Ki Min |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2020-05-01
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Series: | Sensors |
Subjects: | |
Online Access: | https://www.mdpi.com/1424-8220/20/11/3024 |
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