Enhancement of Withstand Voltage in Silicon Strain Gauges Using a Thin Alkali-Free Glass

Enhancement of Withstand Voltage in Silicon Strain Gauges Using a Thin Alkali-Free Glass

We present a cost-effective approach to produce silicon strain gauges that can withstand very high voltage without using any complex package design and without sacrificing any sensor performance. This is achieved by a special silicon strain gauge structure created on an alkali-free glass substrate t...

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Bibliographic Details
Main Authors: Joon Hyub Kim, Ji-Hoon Han, Chan Won Park, Nam Ki Min
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Sensors
Subjects:
strain gauge
silicon
alkali-free glass
high withstand voltage
micro-electromechanical system (MEMS)
piezoresistive sensor
Online Access:https://www.mdpi.com/1424-8220/20/11/3024

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