Development of a Microheater with a Large Heating Area and Low Thermal Stress in the Heating Area

Development of a Microheater with a Large Heating Area and Low Thermal Stress in the Heating Area

In this paper, a microheater that can absorb thermal stress and has a large heating area is demonstrated by optimizing the structure and process of the microheater. Four symmetrically distributed elongated support beam structures were machined around the microheater via deep silicon etching. This de...

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Bibliographic Details
Main Authors: Tao Zhang, Zequan Pan, Chunhua Zhang, Liuguang Xiong, Chunmei Yang, Jian Zhang, Mengjiao Shi, Yuhang Wang, Wen Qu
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Micromachines
Subjects:
MEMS
microheater
temperature
large area heating
Online Access:https://www.mdpi.com/2072-666X/15/1/130

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