Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope
In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring segments can be controlled by replacing the straight beam spokes with the elliptic spokes. The degeneration of tw...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-03-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/23/6/2937 |
| _version_ | 1797609145543688192 |
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| author | Shihe Wang Jianlin Chen Takashiro Tsukamoto Shuji Tanaka |
| author_facet | Shihe Wang Jianlin Chen Takashiro Tsukamoto Shuji Tanaka |
| author_sort | Shihe Wang |
| collection | DOAJ |
| description | In this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring segments can be controlled by replacing the straight beam spokes with the elliptic spokes. The degeneration of two <i>n</i> = 2 wineglass modes could be realized by optimizing the design parameters of the elliptic spokes. The mode-matched resonator could be obtained when the design parameter, aspect ratio of the elliptic spokes was 25/27. The proposed principle was demonstrated by both numerical simulation and experiment. A frequency mismatch as small as 1330 ± 900 ppm could be experimentally demonstrated, which was much smaller than that of the conventional disk resonator, which achieved as high as 30,000 ppm. |
| first_indexed | 2024-03-11T05:56:27Z |
| format | Article |
| id | doaj.art-a1f834de945b4a3793175842f0ea8c7d |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-11T05:56:27Z |
| publishDate | 2023-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-a1f834de945b4a3793175842f0ea8c7d2023-11-17T13:43:40ZengMDPI AGSensors1424-82202023-03-01236293710.3390/s23062937Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated GyroscopeShihe Wang0Jianlin Chen1Takashiro Tsukamoto2Shuji Tanaka3Department of Robotics, Tohoku University, Sendai 9808579, JapanDepartment of Robotics, Tohoku University, Sendai 9808579, JapanDepartment of Robotics, Tohoku University, Sendai 9808579, JapanDepartment of Robotics, Tohoku University, Sendai 9808579, JapanIn this paper, we report a multi-ring disk resonator with elliptic spokes for compensating the aniso-elasticity of (100) single crystal silicon. The structural coupling between each ring segments can be controlled by replacing the straight beam spokes with the elliptic spokes. The degeneration of two <i>n</i> = 2 wineglass modes could be realized by optimizing the design parameters of the elliptic spokes. The mode-matched resonator could be obtained when the design parameter, aspect ratio of the elliptic spokes was 25/27. The proposed principle was demonstrated by both numerical simulation and experiment. A frequency mismatch as small as 1330 ± 900 ppm could be experimentally demonstrated, which was much smaller than that of the conventional disk resonator, which achieved as high as 30,000 ppm.https://www.mdpi.com/1424-8220/23/6/2937disk resonatormode matched resonatorfrequency mismatch(100) single crystal siliconmulti-ring structureelliptic spoke |
| spellingShingle | Shihe Wang Jianlin Chen Takashiro Tsukamoto Shuji Tanaka Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope Sensors disk resonator mode matched resonator frequency mismatch (100) single crystal silicon multi-ring structure elliptic spoke |
| title | Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope |
| title_full | Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope |
| title_fullStr | Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope |
| title_full_unstemmed | Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope |
| title_short | Multi-Ring Disk Resonator with Elliptic Spokes for Frequency-Modulated Gyroscope |
| title_sort | multi ring disk resonator with elliptic spokes for frequency modulated gyroscope |
| topic | disk resonator mode matched resonator frequency mismatch (100) single crystal silicon multi-ring structure elliptic spoke |
| url | https://www.mdpi.com/1424-8220/23/6/2937 |
| work_keys_str_mv | AT shihewang multiringdiskresonatorwithellipticspokesforfrequencymodulatedgyroscope AT jianlinchen multiringdiskresonatorwithellipticspokesforfrequencymodulatedgyroscope AT takashirotsukamoto multiringdiskresonatorwithellipticspokesforfrequencymodulatedgyroscope AT shujitanaka multiringdiskresonatorwithellipticspokesforfrequencymodulatedgyroscope |