Progress of Diamond-like Carbon Films

Progress of Diamond-like Carbon Films

Diamond-like carbon(DLC) films had many unique and outstanding properties such as high thermal conductivity, high hardness, excellent chemical inertness, low friction coefficients and wear coefficients. The properties and combinations were very promising for heat sink, micro-electromechanical device...

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Bibliographic Details
Main Authors: CHEN Qing-yun, SHI Kai-min, SU Min-hua, LYU Hui-yi, LUO Yu, ZENG Chen
Format: Article
Language:zho
Published: Journal of Materials Engineering 2017-03-01
Series:Cailiao gongcheng
Subjects:
diamond-like carbon
deposition mechanism
adhesion
tribological property
Online Access:http://jme.biam.ac.cn/CN/Y2017/V45/I3/119

Internet

http://jme.biam.ac.cn/CN/Y2017/V45/I3/119

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