Perimeter Modes of Nanomechanical Resonators Exhibit Quality Factors Exceeding 10^{9} at Room Temperature

Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy, and quantum control of mechanical oscillators via optomechanics and electromechanics. The mechanical quality factor (Q) of these systems determines th...

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Main Authors: Mohammad J. Bereyhi, Amirali Arabmoheghi, Alberto Beccari, Sergey A. Fedorov, Guanhao Huang, Tobias J. Kippenberg, Nils J. Engelsen
Format: Article
Language:English
Published: American Physical Society 2022-05-01
Series:Physical Review X
Online Access:http://doi.org/10.1103/PhysRevX.12.021036
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author Mohammad J. Bereyhi
Amirali Arabmoheghi
Alberto Beccari
Sergey A. Fedorov
Guanhao Huang
Tobias J. Kippenberg
Nils J. Engelsen
author_facet Mohammad J. Bereyhi
Amirali Arabmoheghi
Alberto Beccari
Sergey A. Fedorov
Guanhao Huang
Tobias J. Kippenberg
Nils J. Engelsen
author_sort Mohammad J. Bereyhi
collection DOAJ
description Systems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy, and quantum control of mechanical oscillators via optomechanics and electromechanics. The mechanical quality factor (Q) of these systems determines the thermomechanical force noise and the thermal decoherence rate of mechanical quantum states. While the dissipation rate is typically set by the bulk acoustic properties of the material, by exploiting dissipation dilution, mechanical Q can be engineered through geometry and increased by many orders of magnitude Recently, soft clamping in combination with strain engineering has enabled room temperature quality factors approaching 10^{9} in millimeter-scale resonators. Here we demonstrate a new approach to soft clamping which exploits vibrations in the perimeter of polygon-shaped resonators tethered at their vertices. In contrast to previous approaches, which rely on cascaded elements to achieve soft clamping, perimeter modes are soft clamped due to symmetry and the boundary conditions at the polygon vertices. Perimeter modes reach Q’s of 3.6×10^{9}—a record at room temperature—while spanning only two acoustic wavelengths. We demonstrate thermal-noise-limited force sensitivity of 1.3  aN/sqrt[Hz] for a 226 kHz perimeter mode with quality factor of 1.5×10^{9} at room temperature. The small size of our devices makes them well suited for near-field integration with microcavities for quantum optomechanical experiments. Moreover, their compactness allows the realization of phononic lattices. We demonstrate a one-dimensional Su-Schrieffer-Heeger chain of high-Q perimeter modes coupled via nearest-neighbour interaction and characterize the localized edge modes.
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spelling doaj.art-a21d5c473b5b43a98400e67acf21ecfe2022-12-22T04:42:22ZengAmerican Physical SocietyPhysical Review X2160-33082022-05-0112202103610.1103/PhysRevX.12.021036Perimeter Modes of Nanomechanical Resonators Exhibit Quality Factors Exceeding 10^{9} at Room TemperatureMohammad J. BereyhiAmirali ArabmoheghiAlberto BeccariSergey A. FedorovGuanhao HuangTobias J. KippenbergNils J. EngelsenSystems with low mechanical dissipation are extensively used in precision measurements such as gravitational wave detection, atomic force microscopy, and quantum control of mechanical oscillators via optomechanics and electromechanics. The mechanical quality factor (Q) of these systems determines the thermomechanical force noise and the thermal decoherence rate of mechanical quantum states. While the dissipation rate is typically set by the bulk acoustic properties of the material, by exploiting dissipation dilution, mechanical Q can be engineered through geometry and increased by many orders of magnitude Recently, soft clamping in combination with strain engineering has enabled room temperature quality factors approaching 10^{9} in millimeter-scale resonators. Here we demonstrate a new approach to soft clamping which exploits vibrations in the perimeter of polygon-shaped resonators tethered at their vertices. In contrast to previous approaches, which rely on cascaded elements to achieve soft clamping, perimeter modes are soft clamped due to symmetry and the boundary conditions at the polygon vertices. Perimeter modes reach Q’s of 3.6×10^{9}—a record at room temperature—while spanning only two acoustic wavelengths. We demonstrate thermal-noise-limited force sensitivity of 1.3  aN/sqrt[Hz] for a 226 kHz perimeter mode with quality factor of 1.5×10^{9} at room temperature. The small size of our devices makes them well suited for near-field integration with microcavities for quantum optomechanical experiments. Moreover, their compactness allows the realization of phononic lattices. We demonstrate a one-dimensional Su-Schrieffer-Heeger chain of high-Q perimeter modes coupled via nearest-neighbour interaction and characterize the localized edge modes.http://doi.org/10.1103/PhysRevX.12.021036
spellingShingle Mohammad J. Bereyhi
Amirali Arabmoheghi
Alberto Beccari
Sergey A. Fedorov
Guanhao Huang
Tobias J. Kippenberg
Nils J. Engelsen
Perimeter Modes of Nanomechanical Resonators Exhibit Quality Factors Exceeding 10^{9} at Room Temperature
Physical Review X
title Perimeter Modes of Nanomechanical Resonators Exhibit Quality Factors Exceeding 10^{9} at Room Temperature
title_full Perimeter Modes of Nanomechanical Resonators Exhibit Quality Factors Exceeding 10^{9} at Room Temperature
title_fullStr Perimeter Modes of Nanomechanical Resonators Exhibit Quality Factors Exceeding 10^{9} at Room Temperature
title_full_unstemmed Perimeter Modes of Nanomechanical Resonators Exhibit Quality Factors Exceeding 10^{9} at Room Temperature
title_short Perimeter Modes of Nanomechanical Resonators Exhibit Quality Factors Exceeding 10^{9} at Room Temperature
title_sort perimeter modes of nanomechanical resonators exhibit quality factors exceeding 10 9 at room temperature
url http://doi.org/10.1103/PhysRevX.12.021036
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