Calibration Technique for MBE Growth of Long Wavelength InAlAs/InGaAs Quantum Cascade Lasers
In this paper, we present the methodology for precise calibration of the Molecular Beam Epitaxy (MBE) growth process and achieving run-to-run stability of growth parameters. We present the analysis of the influence of fluxes stability during the growth of long wavelength quantum cascade laser struct...
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MDPI AG
2023-09-01
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| Series: | Crystals |
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| Online Access: | https://www.mdpi.com/2073-4352/13/9/1341 |
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| author | Piotr Gutowski Iwona Sankowska Maciej Bugajski Grzegorz Sobczak Aleksandr Kuźmicz Kamil Pierściński |
| author_facet | Piotr Gutowski Iwona Sankowska Maciej Bugajski Grzegorz Sobczak Aleksandr Kuźmicz Kamil Pierściński |
| author_sort | Piotr Gutowski |
| collection | DOAJ |
| description | In this paper, we present the methodology for precise calibration of the Molecular Beam Epitaxy (MBE) growth process and achieving run-to-run stability of growth parameters. We present the analysis of the influence of fluxes stability during the growth of long wavelength quantum cascade laser structures designed for the range λ ~ 12–16 µm on wavelength accuracy with respect to desired emission wavelength. The active region of the lasers has a complex structure of nanometer thickness In<sub>x</sub>Ga<sub>1−x</sub>As/In<sub>y</sub>Al<sub>1−y</sub>As superlattice. As a consequence, the compositional and thickness control of the structure via bulk growth parameters is rather difficult. To deal with this problem, we employ a methodology based on double-superlattice test structures that precede the growth of the actual structures. The test structures are analyzed by High Resolution X-ray Diffraction, which allows calibration of the growth of the complex active region of quantum cascade laser structures. We also theoretically studied the effect of individual flux changes on the emission wavelength and gain parameters of the laser. The results of simulations allow for the determination of flux stability tolerance, preserving acceptable parameters of the laser and providing means of emission wavelength control. The proposed methodology was verified by the growth of laser structures for emission at around 13.5 μm. |
| first_indexed | 2024-03-10T22:54:29Z |
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| id | doaj.art-a23d08a963004199b8bf803d81c87f7f |
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| issn | 2073-4352 |
| language | English |
| last_indexed | 2024-03-10T22:54:29Z |
| publishDate | 2023-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Crystals |
| spelling | doaj.art-a23d08a963004199b8bf803d81c87f7f2023-11-19T10:09:22ZengMDPI AGCrystals2073-43522023-09-01139134110.3390/cryst13091341Calibration Technique for MBE Growth of Long Wavelength InAlAs/InGaAs Quantum Cascade LasersPiotr Gutowski0Iwona Sankowska1Maciej Bugajski2Grzegorz Sobczak3Aleksandr Kuźmicz4Kamil Pierściński5Łukasiewicz Research Network-Institute of Microelectronics and Photonics, Al. Lotników 32/46, 02-668 Warszawa, PolandŁukasiewicz Research Network-Institute of Microelectronics and Photonics, Al. Lotników 32/46, 02-668 Warszawa, PolandŁukasiewicz Research Network-Institute of Microelectronics and Photonics, Al. Lotników 32/46, 02-668 Warszawa, PolandŁukasiewicz Research Network-Institute of Microelectronics and Photonics, Al. Lotników 32/46, 02-668 Warszawa, PolandŁukasiewicz Research Network-Institute of Microelectronics and Photonics, Al. Lotników 32/46, 02-668 Warszawa, PolandŁukasiewicz Research Network-Institute of Microelectronics and Photonics, Al. Lotników 32/46, 02-668 Warszawa, PolandIn this paper, we present the methodology for precise calibration of the Molecular Beam Epitaxy (MBE) growth process and achieving run-to-run stability of growth parameters. We present the analysis of the influence of fluxes stability during the growth of long wavelength quantum cascade laser structures designed for the range λ ~ 12–16 µm on wavelength accuracy with respect to desired emission wavelength. The active region of the lasers has a complex structure of nanometer thickness In<sub>x</sub>Ga<sub>1−x</sub>As/In<sub>y</sub>Al<sub>1−y</sub>As superlattice. As a consequence, the compositional and thickness control of the structure via bulk growth parameters is rather difficult. To deal with this problem, we employ a methodology based on double-superlattice test structures that precede the growth of the actual structures. The test structures are analyzed by High Resolution X-ray Diffraction, which allows calibration of the growth of the complex active region of quantum cascade laser structures. We also theoretically studied the effect of individual flux changes on the emission wavelength and gain parameters of the laser. The results of simulations allow for the determination of flux stability tolerance, preserving acceptable parameters of the laser and providing means of emission wavelength control. The proposed methodology was verified by the growth of laser structures for emission at around 13.5 μm.https://www.mdpi.com/2073-4352/13/9/1341quantum cascade lasermolecular beam epitaxyInAlAs/InGaAs |
| spellingShingle | Piotr Gutowski Iwona Sankowska Maciej Bugajski Grzegorz Sobczak Aleksandr Kuźmicz Kamil Pierściński Calibration Technique for MBE Growth of Long Wavelength InAlAs/InGaAs Quantum Cascade Lasers Crystals quantum cascade laser molecular beam epitaxy InAlAs/InGaAs |
| title | Calibration Technique for MBE Growth of Long Wavelength InAlAs/InGaAs Quantum Cascade Lasers |
| title_full | Calibration Technique for MBE Growth of Long Wavelength InAlAs/InGaAs Quantum Cascade Lasers |
| title_fullStr | Calibration Technique for MBE Growth of Long Wavelength InAlAs/InGaAs Quantum Cascade Lasers |
| title_full_unstemmed | Calibration Technique for MBE Growth of Long Wavelength InAlAs/InGaAs Quantum Cascade Lasers |
| title_short | Calibration Technique for MBE Growth of Long Wavelength InAlAs/InGaAs Quantum Cascade Lasers |
| title_sort | calibration technique for mbe growth of long wavelength inalas ingaas quantum cascade lasers |
| topic | quantum cascade laser molecular beam epitaxy InAlAs/InGaAs |
| url | https://www.mdpi.com/2073-4352/13/9/1341 |
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