Calibration Technique for MBE Growth of Long Wavelength InAlAs/InGaAs Quantum Cascade Lasers

Calibration Technique for MBE Growth of Long Wavelength InAlAs/InGaAs Quantum Cascade Lasers

In this paper, we present the methodology for precise calibration of the Molecular Beam Epitaxy (MBE) growth process and achieving run-to-run stability of growth parameters. We present the analysis of the influence of fluxes stability during the growth of long wavelength quantum cascade laser struct...

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Bibliographic Details
Main Authors: Piotr Gutowski, Iwona Sankowska, Maciej Bugajski, Grzegorz Sobczak, Aleksandr Kuźmicz, Kamil Pierściński
Format: Article
Language:English
Published: MDPI AG 2023-09-01
Series:Crystals
Subjects:
quantum cascade laser
molecular beam epitaxy
InAlAs/InGaAs
Online Access:https://www.mdpi.com/2073-4352/13/9/1341

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