The improvement of GaN-based light-emitting diodes using nanopatterned sapphire substrate with small pattern spacing

Self-assembly SiO2 nanosphere monolayer template is utilized to fabricate nanopatterned sapphire substrates (NPSSs) with 0-nm, 50-nm, and 120-nm spacing, receptively. The GaN growth on top of NPSS with 0-nm spacing has the best crystal quality because of laterally epitaxial overgrowth. However, GaN...

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Main Authors: Yonghui Zhang, Tongbo Wei, Junxi Wang, Ding Lan, Yu Chen, Qiang Hu, Hongxi Lu, Jinmin Li
Format: Article
Language:English
Published: AIP Publishing LLC 2014-02-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/1.4867091
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author Yonghui Zhang
Tongbo Wei
Junxi Wang
Ding Lan
Yu Chen
Qiang Hu
Hongxi Lu
Jinmin Li
author_facet Yonghui Zhang
Tongbo Wei
Junxi Wang
Ding Lan
Yu Chen
Qiang Hu
Hongxi Lu
Jinmin Li
author_sort Yonghui Zhang
collection DOAJ
description Self-assembly SiO2 nanosphere monolayer template is utilized to fabricate nanopatterned sapphire substrates (NPSSs) with 0-nm, 50-nm, and 120-nm spacing, receptively. The GaN growth on top of NPSS with 0-nm spacing has the best crystal quality because of laterally epitaxial overgrowth. However, GaN growth from pattern top is more difficult to get smooth surface than from pattern bottom. The rougher surface may result in a higher work voltage. The stimulation results of finite-difference time-domain (FDTD) display that too large or too small spacing lead to the reduced light extracted efficiency (LEE) of LEDs. Under a driving current 350 mA, the external quantum efficiencies (EQE) of GaN-based LEDs grown on NPSSs with 0-nm, 50-nm, and 120-nm spacing increase by 43.3%, 50.6%, and 39.1%, respectively, compared to that on flat sapphire substrate (FSS). The optimized pattern spacing is 50 nm for the NPSS with 600-nm pattern period.
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spelling doaj.art-a26668bac53c4ad4bdd4af456ca584e12022-12-21T20:03:19ZengAIP Publishing LLCAIP Advances2158-32262014-02-0142027123027123-610.1063/1.4867091025402ADVThe improvement of GaN-based light-emitting diodes using nanopatterned sapphire substrate with small pattern spacingYonghui Zhang0Tongbo Wei1Junxi Wang2Ding Lan3Yu Chen4Qiang Hu5Hongxi Lu6Jinmin Li7State Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, ChinaState Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, ChinaState Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, ChinaNational Microgravity Laboratory, Institute of Mechanics, Chinese Academy of Sciences, Beijing, 100080, ChinaState Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, ChinaState Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, ChinaState Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, ChinaState Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, 100083, ChinaSelf-assembly SiO2 nanosphere monolayer template is utilized to fabricate nanopatterned sapphire substrates (NPSSs) with 0-nm, 50-nm, and 120-nm spacing, receptively. The GaN growth on top of NPSS with 0-nm spacing has the best crystal quality because of laterally epitaxial overgrowth. However, GaN growth from pattern top is more difficult to get smooth surface than from pattern bottom. The rougher surface may result in a higher work voltage. The stimulation results of finite-difference time-domain (FDTD) display that too large or too small spacing lead to the reduced light extracted efficiency (LEE) of LEDs. Under a driving current 350 mA, the external quantum efficiencies (EQE) of GaN-based LEDs grown on NPSSs with 0-nm, 50-nm, and 120-nm spacing increase by 43.3%, 50.6%, and 39.1%, respectively, compared to that on flat sapphire substrate (FSS). The optimized pattern spacing is 50 nm for the NPSS with 600-nm pattern period.http://dx.doi.org/10.1063/1.4867091
spellingShingle Yonghui Zhang
Tongbo Wei
Junxi Wang
Ding Lan
Yu Chen
Qiang Hu
Hongxi Lu
Jinmin Li
The improvement of GaN-based light-emitting diodes using nanopatterned sapphire substrate with small pattern spacing
AIP Advances
title The improvement of GaN-based light-emitting diodes using nanopatterned sapphire substrate with small pattern spacing
title_full The improvement of GaN-based light-emitting diodes using nanopatterned sapphire substrate with small pattern spacing
title_fullStr The improvement of GaN-based light-emitting diodes using nanopatterned sapphire substrate with small pattern spacing
title_full_unstemmed The improvement of GaN-based light-emitting diodes using nanopatterned sapphire substrate with small pattern spacing
title_short The improvement of GaN-based light-emitting diodes using nanopatterned sapphire substrate with small pattern spacing
title_sort improvement of gan based light emitting diodes using nanopatterned sapphire substrate with small pattern spacing
url http://dx.doi.org/10.1063/1.4867091
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