Porous Polydimethylsiloxane Elastomer Hybrid with Zinc Oxide Nanowire for Wearable, Wide-Range, and Low Detection Limit Capacitive Pressure Sensor

We propose a flexible capacitive pressure sensor that utilizes porous polydimethylsiloxane elastomer with zinc oxide nanowire as nanocomposite dielectric layer via a simple porogen-assisted process. With the incorporation of nanowires into the porous elastomer, our capacitive pressure sensor is not...

Full description

Bibliographic Details
Main Authors: Gen-Wen Hsieh, Liang-Cheng Shih, Pei-Yuan Chen
Format: Article
Language:English
Published: MDPI AG 2022-01-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/12/2/256
_version_ 1797491423658901504
author Gen-Wen Hsieh
Liang-Cheng Shih
Pei-Yuan Chen
author_facet Gen-Wen Hsieh
Liang-Cheng Shih
Pei-Yuan Chen
author_sort Gen-Wen Hsieh
collection DOAJ
description We propose a flexible capacitive pressure sensor that utilizes porous polydimethylsiloxane elastomer with zinc oxide nanowire as nanocomposite dielectric layer via a simple porogen-assisted process. With the incorporation of nanowires into the porous elastomer, our capacitive pressure sensor is not only highly responsive to subtle stimuli but vigorously so to gentle touch and verbal stimulation from 0 to 50 kPa. The fabricated zinc oxide nanowire–porous polydimethylsiloxane sensor exhibits superior sensitivity of 0.717 kPa<sup>−1</sup>, 0.360 kPa<sup>−1</sup>, and 0.200 kPa<sup>−1</sup> at the pressure regimes of 0–50 Pa, 50–1000 Pa, and 1000–3000 Pa, respectively, presenting an approximate enhancement by 21−100 times when compared to that of a flat polydimethylsiloxane device. The nanocomposite dielectric layer also reveals an ultralow detection limit of 1.0 Pa, good stability, and durability after 4000 loading–unloading cycles, making it capable of perception of various human motions, such as finger bending, calligraphy writing, throat vibration, and airflow blowing. A proof-of-concept trial in hydrostatic water pressure sensing has been demonstrated with the proposed sensors, which can detect tiny changes in water pressure and may be helpful for underwater sensing research. This work brings out the efficacy of constructing wearable capacitive pressure sensors based on a porous dielectric hybrid with stress-sensitive nanostructures, providing wide prospective applications in wearable electronics, health monitoring, and smart artificial robotics/prosthetics.
first_indexed 2024-03-10T00:48:13Z
format Article
id doaj.art-a2f0f041237e4befb85705b9ea6c3634
institution Directory Open Access Journal
issn 2079-4991
language English
last_indexed 2024-03-10T00:48:13Z
publishDate 2022-01-01
publisher MDPI AG
record_format Article
series Nanomaterials
spelling doaj.art-a2f0f041237e4befb85705b9ea6c36342023-11-23T14:55:26ZengMDPI AGNanomaterials2079-49912022-01-0112225610.3390/nano12020256Porous Polydimethylsiloxane Elastomer Hybrid with Zinc Oxide Nanowire for Wearable, Wide-Range, and Low Detection Limit Capacitive Pressure SensorGen-Wen Hsieh0Liang-Cheng Shih1Pei-Yuan Chen2Institute of Lighting and Energy Photonics, College of Photonics, National Yang Ming Chiao Tung University, 301, Section 2, Gaofa 3rd Road, Guiren District, Tainan 71150, TaiwanInstitute of Photonic System, College of Photonics, National Yang Ming Chiao Tung University, 301, Gaofa 3rd Road, Section 2, Guiren District, Tainan 71150, TaiwanInstitute of Photonic System, College of Photonics, National Yang Ming Chiao Tung University, 301, Gaofa 3rd Road, Section 2, Guiren District, Tainan 71150, TaiwanWe propose a flexible capacitive pressure sensor that utilizes porous polydimethylsiloxane elastomer with zinc oxide nanowire as nanocomposite dielectric layer via a simple porogen-assisted process. With the incorporation of nanowires into the porous elastomer, our capacitive pressure sensor is not only highly responsive to subtle stimuli but vigorously so to gentle touch and verbal stimulation from 0 to 50 kPa. The fabricated zinc oxide nanowire–porous polydimethylsiloxane sensor exhibits superior sensitivity of 0.717 kPa<sup>−1</sup>, 0.360 kPa<sup>−1</sup>, and 0.200 kPa<sup>−1</sup> at the pressure regimes of 0–50 Pa, 50–1000 Pa, and 1000–3000 Pa, respectively, presenting an approximate enhancement by 21−100 times when compared to that of a flat polydimethylsiloxane device. The nanocomposite dielectric layer also reveals an ultralow detection limit of 1.0 Pa, good stability, and durability after 4000 loading–unloading cycles, making it capable of perception of various human motions, such as finger bending, calligraphy writing, throat vibration, and airflow blowing. A proof-of-concept trial in hydrostatic water pressure sensing has been demonstrated with the proposed sensors, which can detect tiny changes in water pressure and may be helpful for underwater sensing research. This work brings out the efficacy of constructing wearable capacitive pressure sensors based on a porous dielectric hybrid with stress-sensitive nanostructures, providing wide prospective applications in wearable electronics, health monitoring, and smart artificial robotics/prosthetics.https://www.mdpi.com/2079-4991/12/2/256capacitive pressure sensorporous polydimethylsiloxanestress-sensitivewearable electroniczinc oxide nanowire
spellingShingle Gen-Wen Hsieh
Liang-Cheng Shih
Pei-Yuan Chen
Porous Polydimethylsiloxane Elastomer Hybrid with Zinc Oxide Nanowire for Wearable, Wide-Range, and Low Detection Limit Capacitive Pressure Sensor
Nanomaterials
capacitive pressure sensor
porous polydimethylsiloxane
stress-sensitive
wearable electronic
zinc oxide nanowire
title Porous Polydimethylsiloxane Elastomer Hybrid with Zinc Oxide Nanowire for Wearable, Wide-Range, and Low Detection Limit Capacitive Pressure Sensor
title_full Porous Polydimethylsiloxane Elastomer Hybrid with Zinc Oxide Nanowire for Wearable, Wide-Range, and Low Detection Limit Capacitive Pressure Sensor
title_fullStr Porous Polydimethylsiloxane Elastomer Hybrid with Zinc Oxide Nanowire for Wearable, Wide-Range, and Low Detection Limit Capacitive Pressure Sensor
title_full_unstemmed Porous Polydimethylsiloxane Elastomer Hybrid with Zinc Oxide Nanowire for Wearable, Wide-Range, and Low Detection Limit Capacitive Pressure Sensor
title_short Porous Polydimethylsiloxane Elastomer Hybrid with Zinc Oxide Nanowire for Wearable, Wide-Range, and Low Detection Limit Capacitive Pressure Sensor
title_sort porous polydimethylsiloxane elastomer hybrid with zinc oxide nanowire for wearable wide range and low detection limit capacitive pressure sensor
topic capacitive pressure sensor
porous polydimethylsiloxane
stress-sensitive
wearable electronic
zinc oxide nanowire
url https://www.mdpi.com/2079-4991/12/2/256
work_keys_str_mv AT genwenhsieh porouspolydimethylsiloxaneelastomerhybridwithzincoxidenanowireforwearablewiderangeandlowdetectionlimitcapacitivepressuresensor
AT liangchengshih porouspolydimethylsiloxaneelastomerhybridwithzincoxidenanowireforwearablewiderangeandlowdetectionlimitcapacitivepressuresensor
AT peiyuanchen porouspolydimethylsiloxaneelastomerhybridwithzincoxidenanowireforwearablewiderangeandlowdetectionlimitcapacitivepressuresensor