Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime
We present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This combination provides results with minimal computat...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-04-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/7/2566 |
| _version_ | 1797538695176257536 |
|---|---|
| author | Boris A. Boom Alessandro Bertolini Eric Hennes Johannes F. J. van den Brand |
| author_facet | Boris A. Boom Alessandro Bertolini Eric Hennes Johannes F. J. van den Brand |
| author_sort | Boris A. Boom |
| collection | DOAJ |
| description | We present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This combination provides results with minimal computational expense and through freely available software, as well as insight into how the gas damping depends on the transducer geometry in the molecular flow regime. The results can be used to predict damping for arbitrary gas mixtures. The analysis was verified by experimental results for both air and helium atmospheres and matches these data to within 15% over a wide range of pressures. |
| first_indexed | 2024-03-10T12:34:04Z |
| format | Article |
| id | doaj.art-a2fa1b424cf6469db453476660603b80 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T12:34:04Z |
| publishDate | 2021-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-a2fa1b424cf6469db453476660603b802023-11-21T14:24:30ZengMDPI AGSensors1424-82202021-04-01217256610.3390/s21072566Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow RegimeBoris A. Boom0Alessandro Bertolini1Eric Hennes2Johannes F. J. van den Brand3National Institute for Subatomic Physics, Science Park 105, 1098 XG Amsterdam, The NetherlandsNational Institute for Subatomic Physics, Science Park 105, 1098 XG Amsterdam, The NetherlandsNational Institute for Subatomic Physics, Science Park 105, 1098 XG Amsterdam, The NetherlandsNational Institute for Subatomic Physics, Science Park 105, 1098 XG Amsterdam, The NetherlandsWe present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This combination provides results with minimal computational expense and through freely available software, as well as insight into how the gas damping depends on the transducer geometry in the molecular flow regime. The results can be used to predict damping for arbitrary gas mixtures. The analysis was verified by experimental results for both air and helium atmospheres and matches these data to within 15% over a wide range of pressures.https://www.mdpi.com/1424-8220/21/7/2566capacitance transducersfree molecular flowgas dampingMonte Carlo methodsQ measurement |
| spellingShingle | Boris A. Boom Alessandro Bertolini Eric Hennes Johannes F. J. van den Brand Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime Sensors capacitance transducers free molecular flow gas damping Monte Carlo methods Q measurement |
| title | Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime |
| title_full | Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime |
| title_fullStr | Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime |
| title_full_unstemmed | Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime |
| title_short | Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime |
| title_sort | gas damping in capacitive mems transducers in the free molecular flow regime |
| topic | capacitance transducers free molecular flow gas damping Monte Carlo methods Q measurement |
| url | https://www.mdpi.com/1424-8220/21/7/2566 |
| work_keys_str_mv | AT borisaboom gasdampingincapacitivememstransducersinthefreemolecularflowregime AT alessandrobertolini gasdampingincapacitivememstransducersinthefreemolecularflowregime AT erichennes gasdampingincapacitivememstransducersinthefreemolecularflowregime AT johannesfjvandenbrand gasdampingincapacitivememstransducersinthefreemolecularflowregime |