Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation
A new way of measuring planar position for micrometric and sub-micrometric applications is presented with a mono sensing electrode and hybrid-frequency excitation. The sensing theory and operation principle are described and summarized, and a printed circuit board (PCB) sensor prototype is built and...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2016-05-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/16/5/691 |
| _version_ | 1817996751638888448 |
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| author | Hongxiang Yu Yu Zhang Mengfeng Shen Hongli Zhang Zhao Gao Dongyun Wang |
| author_facet | Hongxiang Yu Yu Zhang Mengfeng Shen Hongli Zhang Zhao Gao Dongyun Wang |
| author_sort | Hongxiang Yu |
| collection | DOAJ |
| description | A new way of measuring planar position for micrometric and sub-micrometric applications is presented with a mono sensing electrode and hybrid-frequency excitation. The sensing theory and operation principle are described and summarized, and a printed circuit board (PCB) sensor prototype is built and tested. It is shown by the experimental results that a very simple structure and geometric relationship are achieved. Meanwhile, displacement sensitivity on an order of 1.50 mV per micron and measurement repeatability better than 0.002 mm are easily fulfilled for a square zone of 256 mm2, making it a valuable alternative measurement device candidate for flexible and low-cost planar position detection. |
| first_indexed | 2024-04-14T02:26:47Z |
| format | Article |
| id | doaj.art-a30e2287bd944b9b8f89123f378694cd |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-14T02:26:47Z |
| publishDate | 2016-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-a30e2287bd944b9b8f89123f378694cd2022-12-22T02:17:50ZengMDPI AGSensors1424-82202016-05-0116569110.3390/s16050691s16050691Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency ExcitationHongxiang Yu0Yu Zhang1Mengfeng Shen2Hongli Zhang3Zhao Gao4Dongyun Wang5College of Engineering, ZheJiang Normal University, Jinhua 321004, ChinaCollege of Engineering, ZheJiang Normal University, Jinhua 321004, ChinaCollege of Engineering, ZheJiang Normal University, Jinhua 321004, ChinaCollege of Engineering, ZheJiang Normal University, Jinhua 321004, ChinaCollege of Engineering, ZheJiang Normal University, Jinhua 321004, ChinaCollege of Engineering, ZheJiang Normal University, Jinhua 321004, ChinaA new way of measuring planar position for micrometric and sub-micrometric applications is presented with a mono sensing electrode and hybrid-frequency excitation. The sensing theory and operation principle are described and summarized, and a printed circuit board (PCB) sensor prototype is built and tested. It is shown by the experimental results that a very simple structure and geometric relationship are achieved. Meanwhile, displacement sensitivity on an order of 1.50 mV per micron and measurement repeatability better than 0.002 mm are easily fulfilled for a square zone of 256 mm2, making it a valuable alternative measurement device candidate for flexible and low-cost planar position detection.http://www.mdpi.com/1424-8220/16/5/691planar positioncapacitive sensormono-electrodehybrid-frequency |
| spellingShingle | Hongxiang Yu Yu Zhang Mengfeng Shen Hongli Zhang Zhao Gao Dongyun Wang Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation Sensors planar position capacitive sensor mono-electrode hybrid-frequency |
| title | Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation |
| title_full | Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation |
| title_fullStr | Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation |
| title_full_unstemmed | Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation |
| title_short | Planar Position Sensor Based on Mono Sensing Electrode and Hybrid-Frequency Excitation |
| title_sort | planar position sensor based on mono sensing electrode and hybrid frequency excitation |
| topic | planar position capacitive sensor mono-electrode hybrid-frequency |
| url | http://www.mdpi.com/1424-8220/16/5/691 |
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