Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review
Abstract Compliant micromechanisms (CMMs) acquire mobility from the deflection of elastic members and have been proven to be robust by millions of silicon MEMS devices. However, the limited deflection of silicon impedes the realization of more sophisticated CMMs, which often require larger deflectio...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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SpringerOpen
2021-09-01
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| Series: | Chinese Journal of Mechanical Engineering |
| Subjects: | |
| Online Access: | https://doi.org/10.1186/s10033-021-00606-y |
| _version_ | 1818364165778046976 |
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| author | Minchang Wang Daohan Ge Liqiang Zhang Just L. Herder |
| author_facet | Minchang Wang Daohan Ge Liqiang Zhang Just L. Herder |
| author_sort | Minchang Wang |
| collection | DOAJ |
| description | Abstract Compliant micromechanisms (CMMs) acquire mobility from the deflection of elastic members and have been proven to be robust by millions of silicon MEMS devices. However, the limited deflection of silicon impedes the realization of more sophisticated CMMs, which often require larger deflections. Recently, some novel manufacturing processes have emerged but are not well known by the community. In this paper, the realization of CMMs is reviewed, aiming to provide help to mechanical designers to quickly find the proper realization method for their CMM designs. To this end, the literature surveyed was classified and statistically analyzed, and representative processes were summarized individually to reflect the state of the art of CMM manufacturing. Furthermore, the features of each process were collected into tables to facilitate the reference of readers, and the guidelines for process selection were discussed. The review results indicate that, even though the silicon process remains dominant, great progress has been made in the development of polymer-related and composite-related processes, such as micromolding, SU-8 process, laser ablation, 3D printing, and the CNT frameworking. These processes result in constituent materials with a lower Young’s modulus and larger maximum allowable strain than silicon, and therefore allow larger deflection. The geometrical capabilities (e.g., aspect ratio) of the realization methods should also be considered, because different types of CMMs have different requirements. We conclude that the SU-8 process, 3D printing, and carbon nanotube frameworking will play more important roles in the future owing to their excellent comprehensive capabilities. |
| first_indexed | 2024-12-13T22:00:02Z |
| format | Article |
| id | doaj.art-a32155c0191e4093a7775ea38715b09d |
| institution | Directory Open Access Journal |
| issn | 1000-9345 2192-8258 |
| language | English |
| last_indexed | 2024-12-13T22:00:02Z |
| publishDate | 2021-09-01 |
| publisher | SpringerOpen |
| record_format | Article |
| series | Chinese Journal of Mechanical Engineering |
| spelling | doaj.art-a32155c0191e4093a7775ea38715b09d2022-12-21T23:30:03ZengSpringerOpenChinese Journal of Mechanical Engineering1000-93452192-82582021-09-0134112210.1186/s10033-021-00606-yMicro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A ReviewMinchang Wang0Daohan Ge1Liqiang Zhang2Just L. Herder3Institute of Intelligent Flexible Mechatronics, Jiangsu UniversityInstitute of Intelligent Flexible Mechatronics, Jiangsu UniversityInstitute of Intelligent Flexible Mechatronics, Jiangsu UniversityDepartment of Precision and Microsystems Engineering, Faculty of Mechanical, Maritime and Materials Engineering, Delft University of TechnologyAbstract Compliant micromechanisms (CMMs) acquire mobility from the deflection of elastic members and have been proven to be robust by millions of silicon MEMS devices. However, the limited deflection of silicon impedes the realization of more sophisticated CMMs, which often require larger deflections. Recently, some novel manufacturing processes have emerged but are not well known by the community. In this paper, the realization of CMMs is reviewed, aiming to provide help to mechanical designers to quickly find the proper realization method for their CMM designs. To this end, the literature surveyed was classified and statistically analyzed, and representative processes were summarized individually to reflect the state of the art of CMM manufacturing. Furthermore, the features of each process were collected into tables to facilitate the reference of readers, and the guidelines for process selection were discussed. The review results indicate that, even though the silicon process remains dominant, great progress has been made in the development of polymer-related and composite-related processes, such as micromolding, SU-8 process, laser ablation, 3D printing, and the CNT frameworking. These processes result in constituent materials with a lower Young’s modulus and larger maximum allowable strain than silicon, and therefore allow larger deflection. The geometrical capabilities (e.g., aspect ratio) of the realization methods should also be considered, because different types of CMMs have different requirements. We conclude that the SU-8 process, 3D printing, and carbon nanotube frameworking will play more important roles in the future owing to their excellent comprehensive capabilities.https://doi.org/10.1186/s10033-021-00606-yCompliant micromechanismManufacturing processConstituent material |
| spellingShingle | Minchang Wang Daohan Ge Liqiang Zhang Just L. Herder Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review Chinese Journal of Mechanical Engineering Compliant micromechanism Manufacturing process Constituent material |
| title | Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review |
| title_full | Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review |
| title_fullStr | Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review |
| title_full_unstemmed | Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review |
| title_short | Micro-scale Realization of Compliant Mechanisms: Manufacturing Processes and Constituent Materials—A Review |
| title_sort | micro scale realization of compliant mechanisms manufacturing processes and constituent materials a review |
| topic | Compliant micromechanism Manufacturing process Constituent material |
| url | https://doi.org/10.1186/s10033-021-00606-y |
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