Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometry
Abstract Lithium niobate is a material of special interest for its challenging functional properties, which can suit various applications. However, high quality 200‐mm LixNb1‐xO3 thin film grown on sapphire substrate have never been reported so far which limits these potential applications. This pap...
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| Format: | Artikel |
| Sprache: | English |
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Wiley-VCH
2023-12-01
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| Schriftenreihe: | Advanced Materials Interfaces |
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| Online Zugang: | https://doi.org/10.1002/admi.202300535 |
| _version_ | 1827596063705399296 |
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| author | Anna L. Pellegrino Estelle Wagner Francesca Lo Presti William Maudez Simon Kolb Rashmi Rani Antoine Bernard Stephan Guy Alban Gassenq Marina Raevskaia Christian Grillet Rahma Moalla Claude Botella Romain Bachelet Bruno Masenelli Jean‐Marie Bluet Sebastien Cueff Patrick Chapon Giacomo Benvenuti Graziella Malandrino |
| author_facet | Anna L. Pellegrino Estelle Wagner Francesca Lo Presti William Maudez Simon Kolb Rashmi Rani Antoine Bernard Stephan Guy Alban Gassenq Marina Raevskaia Christian Grillet Rahma Moalla Claude Botella Romain Bachelet Bruno Masenelli Jean‐Marie Bluet Sebastien Cueff Patrick Chapon Giacomo Benvenuti Graziella Malandrino |
| author_sort | Anna L. Pellegrino |
| collection | DOAJ |
| description | Abstract Lithium niobate is a material of special interest for its challenging functional properties, which can suit various applications. However, high quality 200‐mm LixNb1‐xO3 thin film grown on sapphire substrate have never been reported so far which limits these potential applications. This paper reports the efficient optimization of high quality LiNbO3 thin film deposition on sapphire (001) substrate through chemical beam vapor deposition in a combinatorial configuration. With this technique, flow ratio of Li/Nb can be tuned from ≈0.25 to ≈2.45 on a single wafer. Various complementary characterizations (by means of diffraction, microscopy and spectroscopy techniques) have been performed at different areas of the film (different cationic ratios) in order to investigate the impact of the cationic stoichiometry deviation on the film properties. Close to cationic stoichiometry (LiNbO3), the epitaxial films are of high quality (single phase in spite of two in‐plane domains, low mosaicity of 0.04°, low surface roughness, refractive index and band gap close to bulk values). Deviating from the stoichiometry conditions, secondary phases are detected (LiNb3O8 for Nb‐rich flow ratios, and Li3NbO4 with partial amorphization for Li‐rich flow ratios). LiNbO3 films are of high interest for various key applications in data communications among others. |
| first_indexed | 2024-03-09T03:04:11Z |
| format | Article |
| id | doaj.art-a32b3cb9227e44b1bb4bb9c35699d1bf |
| institution | Directory Open Access Journal |
| issn | 2196-7350 |
| language | English |
| last_indexed | 2024-03-09T03:04:11Z |
| publishDate | 2023-12-01 |
| publisher | Wiley-VCH |
| record_format | Article |
| series | Advanced Materials Interfaces |
| spelling | doaj.art-a32b3cb9227e44b1bb4bb9c35699d1bf2023-12-04T08:15:21ZengWiley-VCHAdvanced Materials Interfaces2196-73502023-12-011034n/an/a10.1002/admi.202300535Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic StoichiometryAnna L. Pellegrino0Estelle Wagner1Francesca Lo Presti2William Maudez3Simon Kolb4Rashmi Rani5Antoine Bernard6Stephan Guy7Alban Gassenq8Marina Raevskaia9Christian Grillet10Rahma Moalla11Claude Botella12Romain Bachelet13Bruno Masenelli14Jean‐Marie Bluet15Sebastien Cueff16Patrick Chapon17Giacomo Benvenuti18Graziella Malandrino19Dipartimento di Scienze Chimiche Università di Catania and INSTM UdR Catania Catania 95125 Italy3D‐Oxides St Genis Pouilly 01630 FranceDipartimento di Scienze Chimiche Università di Catania and INSTM UdR Catania Catania 95125 Italy3D‐Oxides St Genis Pouilly 01630 France3D‐Oxides St Genis Pouilly 01630 France3D‐Oxides St Genis Pouilly 01630 FranceInstitute Light Matter ILM – UMR5306, Univ Lyon 1 CNRS Villeurbanne Cedex 69622 FranceInstitute Light Matter ILM – UMR5306, Univ Lyon 1 CNRS Villeurbanne Cedex 69622 FranceInstitute Light Matter ILM – UMR5306, Univ Lyon 1 CNRS Villeurbanne Cedex 69622 FranceInstitut des Nanotechnologies de Lyon INL – Univ Lyon CNRS, ECL, INSA Lyon, UCBL CPE Ecully Cedex 69134 FranceInstitut des Nanotechnologies de Lyon INL – Univ Lyon CNRS, ECL, INSA Lyon, UCBL CPE Ecully Cedex 69134 France3D‐Oxides St Genis Pouilly 01630 FranceInstitut des Nanotechnologies de Lyon INL – Univ Lyon CNRS, ECL, INSA Lyon, UCBL CPE Ecully Cedex 69134 FranceInstitut des Nanotechnologies de Lyon INL – Univ Lyon CNRS, ECL, INSA Lyon, UCBL CPE Ecully Cedex 69134 FranceInstitut des Nanotechnologies de Lyon INL – Univ Lyon CNRS, ECL, INSA Lyon, UCBL CPE Ecully Cedex 69134 FranceInstitut des Nanotechnologies de Lyon INL – Univ Lyon CNRS, ECL, INSA Lyon, UCBL CPE Ecully Cedex 69134 FranceInstitut des Nanotechnologies de Lyon INL – Univ Lyon CNRS, ECL, INSA Lyon, UCBL CPE Ecully Cedex 69134 FranceHORIBA France Bd Thomas Gobert Palaiseau 91120 France3D‐Oxides St Genis Pouilly 01630 FranceDipartimento di Scienze Chimiche Università di Catania and INSTM UdR Catania Catania 95125 ItalyAbstract Lithium niobate is a material of special interest for its challenging functional properties, which can suit various applications. However, high quality 200‐mm LixNb1‐xO3 thin film grown on sapphire substrate have never been reported so far which limits these potential applications. This paper reports the efficient optimization of high quality LiNbO3 thin film deposition on sapphire (001) substrate through chemical beam vapor deposition in a combinatorial configuration. With this technique, flow ratio of Li/Nb can be tuned from ≈0.25 to ≈2.45 on a single wafer. Various complementary characterizations (by means of diffraction, microscopy and spectroscopy techniques) have been performed at different areas of the film (different cationic ratios) in order to investigate the impact of the cationic stoichiometry deviation on the film properties. Close to cationic stoichiometry (LiNbO3), the epitaxial films are of high quality (single phase in spite of two in‐plane domains, low mosaicity of 0.04°, low surface roughness, refractive index and band gap close to bulk values). Deviating from the stoichiometry conditions, secondary phases are detected (LiNb3O8 for Nb‐rich flow ratios, and Li3NbO4 with partial amorphization for Li‐rich flow ratios). LiNbO3 films are of high interest for various key applications in data communications among others.https://doi.org/10.1002/admi.202300535chemical beam epitaxycombinatorialepitaxial filmslithium niobateoptical propertiesstructural properties |
| spellingShingle | Anna L. Pellegrino Estelle Wagner Francesca Lo Presti William Maudez Simon Kolb Rashmi Rani Antoine Bernard Stephan Guy Alban Gassenq Marina Raevskaia Christian Grillet Rahma Moalla Claude Botella Romain Bachelet Bruno Masenelli Jean‐Marie Bluet Sebastien Cueff Patrick Chapon Giacomo Benvenuti Graziella Malandrino Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometry Advanced Materials Interfaces chemical beam epitaxy combinatorial epitaxial films lithium niobate optical properties structural properties |
| title | Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometry |
| title_full | Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometry |
| title_fullStr | Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometry |
| title_full_unstemmed | Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometry |
| title_short | Efficient Optimization of High‐Quality Epitaxial Lithium Niobate Thin Films by Chemical Beam Vapor Deposition: Impact of Cationic Stoichiometry |
| title_sort | efficient optimization of high quality epitaxial lithium niobate thin films by chemical beam vapor deposition impact of cationic stoichiometry |
| topic | chemical beam epitaxy combinatorial epitaxial films lithium niobate optical properties structural properties |
| url | https://doi.org/10.1002/admi.202300535 |
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