Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

Background: Helium ion microscopy is a new high-performance alternative to classical scanning electron microscopy. It provides superior resolution and high surface sensitivity by using secondary electrons.Results: We report on a new contrast mechanism that extends the high surface sensitivity that i...

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Bibliographic Details
Main Authors: Gregor Hlawacek, Vasilisa Veligura, Stefan Lorbek, Tijs F. Mocking, Antony George, Raoul van Gastel, Harold J. W. Zandvliet, Bene Poelsema
Format: Article
Language:English
Published: Beilstein-Institut 2012-07-01
Series:Beilstein Journal of Nanotechnology
Subjects:
channeling
contrast mechanism
helium ion microscopy
ion scattering
thin layers
Online Access:https://doi.org/10.3762/bjnano.3.58

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