High-mobility BaSnO3 grown by oxide molecular beam epitaxy

High-mobility perovskite BaSnO3 films are of significant interest as new wide bandgap semiconductors for power electronics, transparent conductors, and as high mobility channels for epitaxial integration with functional perovskites. Despite promising results for single crystals, high-mobility BaSnO3...

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Main Authors: Santosh Raghavan, Timo Schumann, Honggyu Kim, Jack Y. Zhang, Tyler A. Cain, Susanne Stemmer
Format: Article
Language:English
Published: AIP Publishing LLC 2016-01-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/1.4939657
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author Santosh Raghavan
Timo Schumann
Honggyu Kim
Jack Y. Zhang
Tyler A. Cain
Susanne Stemmer
author_facet Santosh Raghavan
Timo Schumann
Honggyu Kim
Jack Y. Zhang
Tyler A. Cain
Susanne Stemmer
author_sort Santosh Raghavan
collection DOAJ
description High-mobility perovskite BaSnO3 films are of significant interest as new wide bandgap semiconductors for power electronics, transparent conductors, and as high mobility channels for epitaxial integration with functional perovskites. Despite promising results for single crystals, high-mobility BaSnO3 films have been challenging to grow. Here, we demonstrate a modified oxide molecular beam epitaxy (MBE) approach, which supplies pre-oxidized SnOx. This technique addresses issues in the MBE of ternary stannates related to volatile SnO formation and enables growth of epitaxial, stoichiometric BaSnO3. We demonstrate room temperature electron mobilities of 150 cm2 V−1 s−1 in films grown on PrScO3. The results open up a wide range of opportunities for future electronic devices.
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spelling doaj.art-a3bf0dd9a9844fb1847b4dde8e2ab7ff2022-12-21T18:38:25ZengAIP Publishing LLCAPL Materials2166-532X2016-01-0141016106016106-510.1063/1.4939657004601APMHigh-mobility BaSnO3 grown by oxide molecular beam epitaxySantosh Raghavan0Timo Schumann1Honggyu Kim2Jack Y. Zhang3Tyler A. Cain4Susanne Stemmer5Materials Department, University of California, Santa Barbara, California 93106-5050, USAMaterials Department, University of California, Santa Barbara, California 93106-5050, USAMaterials Department, University of California, Santa Barbara, California 93106-5050, USAMaterials Department, University of California, Santa Barbara, California 93106-5050, USAMaterials Department, University of California, Santa Barbara, California 93106-5050, USAMaterials Department, University of California, Santa Barbara, California 93106-5050, USAHigh-mobility perovskite BaSnO3 films are of significant interest as new wide bandgap semiconductors for power electronics, transparent conductors, and as high mobility channels for epitaxial integration with functional perovskites. Despite promising results for single crystals, high-mobility BaSnO3 films have been challenging to grow. Here, we demonstrate a modified oxide molecular beam epitaxy (MBE) approach, which supplies pre-oxidized SnOx. This technique addresses issues in the MBE of ternary stannates related to volatile SnO formation and enables growth of epitaxial, stoichiometric BaSnO3. We demonstrate room temperature electron mobilities of 150 cm2 V−1 s−1 in films grown on PrScO3. The results open up a wide range of opportunities for future electronic devices.http://dx.doi.org/10.1063/1.4939657
spellingShingle Santosh Raghavan
Timo Schumann
Honggyu Kim
Jack Y. Zhang
Tyler A. Cain
Susanne Stemmer
High-mobility BaSnO3 grown by oxide molecular beam epitaxy
APL Materials
title High-mobility BaSnO3 grown by oxide molecular beam epitaxy
title_full High-mobility BaSnO3 grown by oxide molecular beam epitaxy
title_fullStr High-mobility BaSnO3 grown by oxide molecular beam epitaxy
title_full_unstemmed High-mobility BaSnO3 grown by oxide molecular beam epitaxy
title_short High-mobility BaSnO3 grown by oxide molecular beam epitaxy
title_sort high mobility basno3 grown by oxide molecular beam epitaxy
url http://dx.doi.org/10.1063/1.4939657
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