Aluminum Concentration Drives the Structural Evolution of Magnetron Sputtering (Ti, Al) C Thin Film
The effect of deposited Al on the structural evolution of TiC films with a chemical composition variation has investigated during combinatorial magnetron sputtering of binary ceramic (Ti, Al) C. The here produced thin films have been investigated by energy dispersive X-ray spectroscopy (EDX) and X-r...
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| Format: | Article |
| Language: | English |
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Unviversity of Technology- Iraq
2018-01-01
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| Series: | Engineering and Technology Journal |
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| Online Access: | https://etj.uotechnology.edu.iq/article_136777_3e2727297535d3a3e56828af383d954b.pdf |