Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process

Amorphous boron carbon nitride (a-BCN) films exhibit excellent properties such as high hardness and high wear resistance. However, the correlation between the film structure and its mechanical properties is not fully understood. In this study, a-BCN films were prepared by an arc-sputtering hybrid pr...

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Bibliographic Details
Main Authors: Yuki Hirata, Ryotaro Takeuchi, Hiroyuki Taniguchi, Masao Kawagoe, Yoshinao Iwamoto, Mikito Yoshizato, Hiroki Akasaka, Naoto Ohtake
Format: Article
Language:English
Published: MDPI AG 2021-02-01
Series:Materials
Subjects:
a-C film
a-BCN film
vacuum arc deposition
magnetron sputtering
structural properties
mechanical properties
Online Access:https://www.mdpi.com/1996-1944/14/4/719

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