Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes
In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2010-04-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/10/4/3363/ |
| _version_ | 1798002440670281728 |
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| author | Chi-Yuan Lee Ay Su Yin-Chieh Liu Pin-Cheng Chan Chia-Hung Lin |
| author_facet | Chi-Yuan Lee Ay Su Yin-Chieh Liu Pin-Cheng Chan Chia-Hung Lin |
| author_sort | Chi-Yuan Lee |
| collection | DOAJ |
| description | In this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06 ± 0.005 (Ω/°C) and 0.033 pF/%RH, respectively. |
| first_indexed | 2024-04-11T11:52:16Z |
| format | Article |
| id | doaj.art-a4f3789e9f7a4dba8a42df931d94c9e4 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T11:52:16Z |
| publishDate | 2010-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-a4f3789e9f7a4dba8a42df931d94c9e42022-12-22T04:25:17ZengMDPI AGSensors1424-82202010-04-011043363337210.3390/s100403363Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting DiodesChi-Yuan LeeAy SuYin-Chieh LiuPin-Cheng ChanChia-Hung LinIn this work micro temperature and humidity sensors are fabricated to measure the junction temperature and humidity of light emitting diodes (LED). The junction temperature is frequently measured using thermal resistance measurement technology. The weakness of this method is that the timing of data capture is not regulated by any standard. This investigation develops a device that can stably and continually measure temperature and humidity. The device is light-weight and can monitor junction temperature and humidity in real time. Using micro-electro-mechanical systems (MEMS), this study minimizes the size of the micro temperature and humidity sensors, which are constructed on a stainless steel foil substrate (40 μm-thick SS-304). The micro temperature and humidity sensors can be fixed between the LED chip and frame. The sensitivities of the micro temperature and humidity sensors are 0.06 ± 0.005 (Ω/°C) and 0.033 pF/%RH, respectively.http://www.mdpi.com/1424-8220/10/4/3363/LEDMEMSflexible micro temperaturehumidity sensors |
| spellingShingle | Chi-Yuan Lee Ay Su Yin-Chieh Liu Pin-Cheng Chan Chia-Hung Lin Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes Sensors LED MEMS flexible micro temperature humidity sensors |
| title | Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
| title_full | Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
| title_fullStr | Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
| title_full_unstemmed | Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
| title_short | Sensor Fabrication Method for in Situ Temperature and Humidity Monitoring of Light Emitting Diodes |
| title_sort | sensor fabrication method for in situ temperature and humidity monitoring of light emitting diodes |
| topic | LED MEMS flexible micro temperature humidity sensors |
| url | http://www.mdpi.com/1424-8220/10/4/3363/ |
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