Deep Etched Gallium Nitride Waveguide for Raman Spectroscopic Applications

Deep Etched Gallium Nitride Waveguide for Raman Spectroscopic Applications

Gallium nitride (GaN) materials with a high chemical stability and biocompatibility are well suited for bio-sensing applications and evanescent wave spectroscopy. However, GaN poses challenges for processing, especially for deep etching using conventional etching techniques. Here, we present a dry-e...

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Bibliographic Details
Main Authors: Yu-Li Hsieh, Wen-Shao Chen, Liann-Be Chang, Lee Chow, Samuel Borges, Alfons Schulte, Shiang-Fu Huang, Ming-Jer Jeng, Chih-Jen Yu
Format: Article
Language:English
Published: MDPI AG 2019-03-01
Series:Crystals
Subjects:
Gallium nitride (GaN)
waveguide
semiconductor processing
tetraethyl orthosilicate (TEOS)
Online Access:https://www.mdpi.com/2073-4352/9/3/176

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