Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption
Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS). We present the design and modeling...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-06-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/8/7/203 |
| _version_ | 1818117329657004032 |
|---|---|
| author | Miguel Lara-Castro Adrian Herrera-Amaya Marco A. Escarola-Rosas Moisés Vázquez-Toledo Francisco López-Huerta Luz A. Aguilera-Cortés Agustín L. Herrera-May |
| author_facet | Miguel Lara-Castro Adrian Herrera-Amaya Marco A. Escarola-Rosas Moisés Vázquez-Toledo Francisco López-Huerta Luz A. Aguilera-Cortés Agustín L. Herrera-May |
| author_sort | Miguel Lara-Castro |
| collection | DOAJ |
| description | Endoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS). We present the design and modeling of polysilicon electrothermal actuators for a MEMS mirror (100 μm × 100 μm × 2.25 μm). These actuators are composed by two beam types (2.25 μm thickness) with different cross-section area, which are separated by 2 μm gap. The mirror and actuators are designed through the Sandia Ultra-planar Multi-level MEMS Technology V (SUMMiT V®) process, obtaining a small footprint size (1028 μm × 1028 µm) for actuators of 550 µm length. The actuators have out-of-plane displacements caused by low dc voltages and without use material layers with distinct thermal expansion coefficients. The temperature behavior along the actuators is calculated through analytical models that include terms of heat energy generation, heat conduction and heat energy loss. The force method is used to predict the maximum out-of-plane displacements in the actuator tip as function of supplied voltage. Both analytical models, under steady-state conditions, employ the polysilicon resistivity as function of the temperature. The electrothermal-and structural behavior of the actuators is studied considering different beams dimensions (length and width) and dc bias voltages from 0.5 to 2.5 V. For 2.5 V, the actuator of 550 µm length reaches a maximum temperature, displacement and electrical power of 115 °C, 10.3 µm and 6.3 mW, respectively. The designed actuation mechanism can be useful for MEMS mirrors of different sizes with potential application in endoscopic OCT systems that require low power consumption. |
| first_indexed | 2024-12-11T04:36:41Z |
| format | Article |
| id | doaj.art-a52f201567784970af42f938b2663c11 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-11T04:36:41Z |
| publishDate | 2017-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-a52f201567784970af42f938b2663c112022-12-22T01:20:44ZengMDPI AGMicromachines2072-666X2017-06-018720310.3390/mi8070203mi8070203Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power ConsumptionMiguel Lara-Castro0Adrian Herrera-Amaya1Marco A. Escarola-Rosas2Moisés Vázquez-Toledo3Francisco López-Huerta4Luz A. Aguilera-Cortés5Agustín L. Herrera-May6Micro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, VER 94294, MexicoDepto, Ingeniería Mecánica, Campus Irapuato-Salamanca, Universidad de Guanajuato/Carretera Salamanca-Valle de Santiago Km. 3.5 + 1.8 km, Salamanca, GTO 36885, MexicoMicro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, VER 94294, MexicoSistemas Automatizados, Centro de Ingeniería y Desarrollo Industrial/Av. Pie de la Cuesta No. 702, Desarrollo San Pablo, Querétaro 76125 MéxicoEngineering Faculty, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, Veracruz 94294, MexicoDepto, Ingeniería Mecánica, Campus Irapuato-Salamanca, Universidad de Guanajuato/Carretera Salamanca-Valle de Santiago Km. 3.5 + 1.8 km, Salamanca, GTO 36885, MexicoMicro and Nanotechnology Research Center, Universidad Veracruzana, Calzada Ruiz Cortines 455, Boca del Río, VER 94294, MexicoEndoscopic optical-coherence tomography (OCT) systems require low cost mirrors with small footprint size, out-of-plane deflections and low bias voltage. These requirements can be achieved with electrothermal actuators based on microelectromechanical systems (MEMS). We present the design and modeling of polysilicon electrothermal actuators for a MEMS mirror (100 μm × 100 μm × 2.25 μm). These actuators are composed by two beam types (2.25 μm thickness) with different cross-section area, which are separated by 2 μm gap. The mirror and actuators are designed through the Sandia Ultra-planar Multi-level MEMS Technology V (SUMMiT V®) process, obtaining a small footprint size (1028 μm × 1028 µm) for actuators of 550 µm length. The actuators have out-of-plane displacements caused by low dc voltages and without use material layers with distinct thermal expansion coefficients. The temperature behavior along the actuators is calculated through analytical models that include terms of heat energy generation, heat conduction and heat energy loss. The force method is used to predict the maximum out-of-plane displacements in the actuator tip as function of supplied voltage. Both analytical models, under steady-state conditions, employ the polysilicon resistivity as function of the temperature. The electrothermal-and structural behavior of the actuators is studied considering different beams dimensions (length and width) and dc bias voltages from 0.5 to 2.5 V. For 2.5 V, the actuator of 550 µm length reaches a maximum temperature, displacement and electrical power of 115 °C, 10.3 µm and 6.3 mW, respectively. The designed actuation mechanism can be useful for MEMS mirrors of different sizes with potential application in endoscopic OCT systems that require low power consumption.http://www.mdpi.com/2072-666X/8/7/203electrothermal actuatorsendoscopic optical-coherence tomographymicroelectromechanical systems (MEMS) mirrorpolysiliconSUMMiT V |
| spellingShingle | Miguel Lara-Castro Adrian Herrera-Amaya Marco A. Escarola-Rosas Moisés Vázquez-Toledo Francisco López-Huerta Luz A. Aguilera-Cortés Agustín L. Herrera-May Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption Micromachines electrothermal actuators endoscopic optical-coherence tomography microelectromechanical systems (MEMS) mirror polysilicon SUMMiT V |
| title | Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption |
| title_full | Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption |
| title_fullStr | Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption |
| title_full_unstemmed | Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption |
| title_short | Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption |
| title_sort | design and modeling of polysilicon electrothermal actuators for a mems mirror with low power consumption |
| topic | electrothermal actuators endoscopic optical-coherence tomography microelectromechanical systems (MEMS) mirror polysilicon SUMMiT V |
| url | http://www.mdpi.com/2072-666X/8/7/203 |
| work_keys_str_mv | AT miguellaracastro designandmodelingofpolysiliconelectrothermalactuatorsforamemsmirrorwithlowpowerconsumption AT adrianherreraamaya designandmodelingofpolysiliconelectrothermalactuatorsforamemsmirrorwithlowpowerconsumption AT marcoaescarolarosas designandmodelingofpolysiliconelectrothermalactuatorsforamemsmirrorwithlowpowerconsumption AT moisesvazqueztoledo designandmodelingofpolysiliconelectrothermalactuatorsforamemsmirrorwithlowpowerconsumption AT franciscolopezhuerta designandmodelingofpolysiliconelectrothermalactuatorsforamemsmirrorwithlowpowerconsumption AT luzaaguileracortes designandmodelingofpolysiliconelectrothermalactuatorsforamemsmirrorwithlowpowerconsumption AT agustinlherreramay designandmodelingofpolysiliconelectrothermalactuatorsforamemsmirrorwithlowpowerconsumption |