Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings
The laser-induced damage threshold (LIDT) of plate laser beam splitter (PLBS) coatings is closely related to the subsurface absorption defects of the substrate. Herein, a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT...
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Cambridge University Press
2023-01-01
|
| Series: | High Power Laser Science and Engineering |
| Subjects: | |
| Online Access: | https://www.cambridge.org/core/product/identifier/S2095471923000373/type/journal_article |
| _version_ | 1797680507793702912 |
|---|---|
| author | Wenyun Du Meiping Zhu Jun Shi Tianbao Liu Jian Sun Kui Yi Jianda Shao |
| author_facet | Wenyun Du Meiping Zhu Jun Shi Tianbao Liu Jian Sun Kui Yi Jianda Shao |
| author_sort | Wenyun Du |
| collection | DOAJ |
| description | The laser-induced damage threshold (LIDT) of plate laser beam splitter (PLBS) coatings is closely related to the subsurface absorption defects of the substrate. Herein, a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT of PLBS coatings. Firstly, BK7 substrates are heat-treated at three different temperatures. The surface morphology and subsurface impurity defect distribution of the substrate before and after the heat treatment are compared. Then, a PLBS coating consisting of alternating HfO2–Al2O3 mixture and SiO2 layers is designed to achieve a beam-splitting ratio (transmittance to reflectance, s-polarized light) of approximately 50:50 at 1053 nm and an angle of incidence of 45°, and it is prepared under four different deposition processes. The experimental and simulation results show that the subsurface impurity defects of the substrate migrate to the surface and accumulate on the surface during the heat treatment, and become absorption defect sources or nodule defect seeds in the coating, reducing the LIDT of the coating. The higher the heat treatment temperature, the more evident the migration and accumulation of impurity defects. A lower deposition temperature (at which the coating can be fully oxidized) helps to improve the LIDT of the PLBS coating. When the deposition temperature is 140°C, the LIDT (s-polarized light, wavelength: 1064 nm, pulse width: 9 ns, incident angle: 45°) of the PLBS coating is 26.2 J/cm2, which is approximately 6.7 times that of the PLBS coating deposited at 200°C. We believe that the investigation into the laser damage mechanism of PLBS coatings will help to improve the LIDT of coatings with partial or high transmittance at laser wavelengths. |
| first_indexed | 2024-03-11T23:31:01Z |
| format | Article |
| id | doaj.art-a5f6bb832c544a4db2df770efa16bda3 |
| institution | Directory Open Access Journal |
| issn | 2095-4719 2052-3289 |
| language | English |
| last_indexed | 2024-03-11T23:31:01Z |
| publishDate | 2023-01-01 |
| publisher | Cambridge University Press |
| record_format | Article |
| series | High Power Laser Science and Engineering |
| spelling | doaj.art-a5f6bb832c544a4db2df770efa16bda32023-09-20T09:20:02ZengCambridge University PressHigh Power Laser Science and Engineering2095-47192052-32892023-01-011110.1017/hpl.2023.37Effect of subsurface impurity defects on laser damage resistance of beam splitter coatingsWenyun Du0https://orcid.org/0000-0002-3089-6173Meiping Zhu1Jun Shi2Tianbao Liu3https://orcid.org/0000-0002-2731-7193Jian Sun4Kui Yi5Jianda Shao6Laboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, ChinaLaboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, China CAS Center for Excellence in Ultra-intense Laser Science, Shanghai, ChinaLaboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, ChinaLaboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, ChinaLaboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, ChinaLaboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, ChinaLaboratory of Thin Film Optics, Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing, China Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou, China CAS Center for Excellence in Ultra-intense Laser Science, Shanghai, ChinaThe laser-induced damage threshold (LIDT) of plate laser beam splitter (PLBS) coatings is closely related to the subsurface absorption defects of the substrate. Herein, a two-step deposition temperature method is proposed to understand the effect of substrate subsurface impurity defects on the LIDT of PLBS coatings. Firstly, BK7 substrates are heat-treated at three different temperatures. The surface morphology and subsurface impurity defect distribution of the substrate before and after the heat treatment are compared. Then, a PLBS coating consisting of alternating HfO2–Al2O3 mixture and SiO2 layers is designed to achieve a beam-splitting ratio (transmittance to reflectance, s-polarized light) of approximately 50:50 at 1053 nm and an angle of incidence of 45°, and it is prepared under four different deposition processes. The experimental and simulation results show that the subsurface impurity defects of the substrate migrate to the surface and accumulate on the surface during the heat treatment, and become absorption defect sources or nodule defect seeds in the coating, reducing the LIDT of the coating. The higher the heat treatment temperature, the more evident the migration and accumulation of impurity defects. A lower deposition temperature (at which the coating can be fully oxidized) helps to improve the LIDT of the PLBS coating. When the deposition temperature is 140°C, the LIDT (s-polarized light, wavelength: 1064 nm, pulse width: 9 ns, incident angle: 45°) of the PLBS coating is 26.2 J/cm2, which is approximately 6.7 times that of the PLBS coating deposited at 200°C. We believe that the investigation into the laser damage mechanism of PLBS coatings will help to improve the LIDT of coatings with partial or high transmittance at laser wavelengths.https://www.cambridge.org/core/product/identifier/S2095471923000373/type/journal_articlelaser-induced damage thresholdnodule defectplate laser beam splittersubsurface impurity defect |
| spellingShingle | Wenyun Du Meiping Zhu Jun Shi Tianbao Liu Jian Sun Kui Yi Jianda Shao Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings High Power Laser Science and Engineering laser-induced damage threshold nodule defect plate laser beam splitter subsurface impurity defect |
| title | Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings |
| title_full | Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings |
| title_fullStr | Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings |
| title_full_unstemmed | Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings |
| title_short | Effect of subsurface impurity defects on laser damage resistance of beam splitter coatings |
| title_sort | effect of subsurface impurity defects on laser damage resistance of beam splitter coatings |
| topic | laser-induced damage threshold nodule defect plate laser beam splitter subsurface impurity defect |
| url | https://www.cambridge.org/core/product/identifier/S2095471923000373/type/journal_article |
| work_keys_str_mv | AT wenyundu effectofsubsurfaceimpuritydefectsonlaserdamageresistanceofbeamsplittercoatings AT meipingzhu effectofsubsurfaceimpuritydefectsonlaserdamageresistanceofbeamsplittercoatings AT junshi effectofsubsurfaceimpuritydefectsonlaserdamageresistanceofbeamsplittercoatings AT tianbaoliu effectofsubsurfaceimpuritydefectsonlaserdamageresistanceofbeamsplittercoatings AT jiansun effectofsubsurfaceimpuritydefectsonlaserdamageresistanceofbeamsplittercoatings AT kuiyi effectofsubsurfaceimpuritydefectsonlaserdamageresistanceofbeamsplittercoatings AT jiandashao effectofsubsurfaceimpuritydefectsonlaserdamageresistanceofbeamsplittercoatings |