Measurement of Sub-Surface Microstructures Based on a Developed Ultrasonic Atomic Force Microscopy

Measurement of Sub-Surface Microstructures Based on a Developed Ultrasonic Atomic Force Microscopy

Accurate and non-destructive technology for detection of subsurface defect has become a key requirement with the emergence of various ultra-precision machining technologies and the application of ultra-precision components. The combination of acoustic technique for sub-surface detection and atomic f...

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Bibliographic Details
Main Authors: Yuyang Wang, Chengjian Wu, Jinyan Tang, Mingyu Duan, Jian Chen, Bing-Feng Ju, Yuan-Liu Chen
Format: Article
Language:English
Published: MDPI AG 2022-05-01
Series:Applied Sciences
Subjects:
measurement
sub-surface microstructure
ultrasonic AFM
contact-resonance AFM
buried depth
Online Access:https://www.mdpi.com/2076-3417/12/11/5460

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