Influence of IR laser doping method on surface emitter with phosphosilicate glass for solar cells
Laser-assisted diffusion of phosphorus dopants has been investigated to realize selective emitters on mc-Si wafers. In this paper, we studied, in the presence of PSG, the effect of laser speed and power doping parameters on the sheet resistance R _Sq variation as a function of selective emitter form...
Main Authors: | A Moussi, A Djelloul, S Meziani, K Bendimrad, L Benharrat, S Chaouchi, K Bourai, A Noukaz |
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Format: | Article |
Language: | English |
Published: |
IOP Publishing
2020-01-01
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Series: | Materials Research Express |
Subjects: | |
Online Access: | https://doi.org/10.1088/2053-1591/ab69c6 |
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