Formation of nanostructured iridium and polycluster diamond films
Iridium films and layered structures "iridium — diamond" were formed on Al2O3, MgO and SrTiO3 substrates. Iridium films were obtained by magnetron sputtering, and polycluster diamond films — by microwave discharge method. Structure of iridium and diamond films was studied depending on form...
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2007-12-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2007/6_2007/pdf/11.zip |