Formation of nanostructured iridium and polycluster diamond films
Iridium films and layered structures "iridium — diamond" were formed on Al2O3, MgO and SrTiO3 substrates. Iridium films were obtained by magnetron sputtering, and polycluster diamond films — by microwave discharge method. Structure of iridium and diamond films was studied depending on form...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Politehperiodika
2007-12-01
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| Series: | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| Subjects: | |
| Online Access: | http://www.tkea.com.ua/tkea/2007/6_2007/pdf/11.zip |
| _version_ | 1811227364735057920 |
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| author | Pashchenko P. V. Timofeev M. A. Mitin V. S. Dzbanovskiy N. N. Suetin N. V. Samoylovich M. I. Pal' A. F. Belyanin A. F. |
| author_facet | Pashchenko P. V. Timofeev M. A. Mitin V. S. Dzbanovskiy N. N. Suetin N. V. Samoylovich M. I. Pal' A. F. Belyanin A. F. |
| author_sort | Pashchenko P. V. |
| collection | DOAJ |
| description | Iridium films and layered structures "iridium — diamond" were formed on Al2O3, MgO and SrTiO3 substrates. Iridium films were obtained by magnetron sputtering, and polycluster diamond films — by microwave discharge method. Structure of iridium and diamond films was studied depending on formation conditions. Application of polycluster diamond films as heatsink for hybrid microcircuit and control grid of electronic devices was considered. |
| first_indexed | 2024-04-12T09:40:11Z |
| format | Article |
| id | doaj.art-a6957c41ea724eb9b3816e540f0e3271 |
| institution | Directory Open Access Journal |
| issn | 2225-5818 |
| language | English |
| last_indexed | 2024-04-12T09:40:11Z |
| publishDate | 2007-12-01 |
| publisher | Politehperiodika |
| record_format | Article |
| series | Tekhnologiya i Konstruirovanie v Elektronnoi Apparature |
| spelling | doaj.art-a6957c41ea724eb9b3816e540f0e32712022-12-22T03:38:05ZengPolitehperiodikaTekhnologiya i Konstruirovanie v Elektronnoi Apparature2225-58182007-12-0165056Formation of nanostructured iridium and polycluster diamond filmsPashchenko P. V.Timofeev M. A.Mitin V. S.Dzbanovskiy N. N.Suetin N. V.Samoylovich M. I.Pal' A. F.Belyanin A. F.Iridium films and layered structures "iridium — diamond" were formed on Al2O3, MgO and SrTiO3 substrates. Iridium films were obtained by magnetron sputtering, and polycluster diamond films — by microwave discharge method. Structure of iridium and diamond films was studied depending on formation conditions. Application of polycluster diamond films as heatsink for hybrid microcircuit and control grid of electronic devices was considered.http://www.tkea.com.ua/tkea/2007/6_2007/pdf/11.zipnano-structured film of iridium and diamondmagnetron sputteringmicrowave dischargemicroelectronics |
| spellingShingle | Pashchenko P. V. Timofeev M. A. Mitin V. S. Dzbanovskiy N. N. Suetin N. V. Samoylovich M. I. Pal' A. F. Belyanin A. F. Formation of nanostructured iridium and polycluster diamond films Tekhnologiya i Konstruirovanie v Elektronnoi Apparature nano-structured film of iridium and diamond magnetron sputtering microwave discharge microelectronics |
| title | Formation of nanostructured iridium and polycluster diamond films |
| title_full | Formation of nanostructured iridium and polycluster diamond films |
| title_fullStr | Formation of nanostructured iridium and polycluster diamond films |
| title_full_unstemmed | Formation of nanostructured iridium and polycluster diamond films |
| title_short | Formation of nanostructured iridium and polycluster diamond films |
| title_sort | formation of nanostructured iridium and polycluster diamond films |
| topic | nano-structured film of iridium and diamond magnetron sputtering microwave discharge microelectronics |
| url | http://www.tkea.com.ua/tkea/2007/6_2007/pdf/11.zip |
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