Research of Constructive and Technological Methods for Forming a Silicon Disk Resonator with Whispering Gallery Modes
This article presents the results of a computer simulation of whispering gallery modes in the structure of a silicon disk resonator with a wedge-shaped profile made on a silicon-on-isolator base (SOI). The rationale for the choice of silicon as a material for its manufacturing is given. The results...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-04-01
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| Series: | Photonics |
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| Online Access: | https://www.mdpi.com/2304-6732/7/2/31 |
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| author | Anastasia Yakuhina Alexey Kadochkin Vladimir Amelichev Dmitry Gorelov Sergey Generalov |
| author_facet | Anastasia Yakuhina Alexey Kadochkin Vladimir Amelichev Dmitry Gorelov Sergey Generalov |
| author_sort | Anastasia Yakuhina |
| collection | DOAJ |
| description | This article presents the results of a computer simulation of whispering gallery modes in the structure of a silicon disk resonator with a wedge-shaped profile made on a silicon-on-isolator base (SOI). The rationale for the choice of silicon as a material for its manufacturing is given. The results of the study of the influence of the wedge angle on the whispering gallery mode parameters (WGM) are presented. The optimum wedge angle of a silicon disk resonator is determined, which ensures the minimum loss and maximum mode stability. The technological aspects of plasma-chemical etching processes for forming a wedge-shaped profile of the edge of a silicon disk resonator are studied. |
| first_indexed | 2024-03-10T20:19:30Z |
| format | Article |
| id | doaj.art-a6a2b53c89cf46f28c7a439ef99ac80e |
| institution | Directory Open Access Journal |
| issn | 2304-6732 |
| language | English |
| last_indexed | 2024-03-10T20:19:30Z |
| publishDate | 2020-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Photonics |
| spelling | doaj.art-a6a2b53c89cf46f28c7a439ef99ac80e2023-11-19T22:19:59ZengMDPI AGPhotonics2304-67322020-04-01723110.3390/photonics7020031Research of Constructive and Technological Methods for Forming a Silicon Disk Resonator with Whispering Gallery ModesAnastasia Yakuhina0Alexey Kadochkin1Vladimir Amelichev2Dmitry Gorelov3Sergey Generalov4Scientific-Manufacturing Complex Technological Centre, Zelenograd, 124498 Moscow, RussiaScientific-Manufacturing Complex Technological Centre, Zelenograd, 124498 Moscow, RussiaScientific-Manufacturing Complex Technological Centre, Zelenograd, 124498 Moscow, RussiaScientific-Manufacturing Complex Technological Centre, Zelenograd, 124498 Moscow, RussiaScientific-Manufacturing Complex Technological Centre, Zelenograd, 124498 Moscow, RussiaThis article presents the results of a computer simulation of whispering gallery modes in the structure of a silicon disk resonator with a wedge-shaped profile made on a silicon-on-isolator base (SOI). The rationale for the choice of silicon as a material for its manufacturing is given. The results of the study of the influence of the wedge angle on the whispering gallery mode parameters (WGM) are presented. The optimum wedge angle of a silicon disk resonator is determined, which ensures the minimum loss and maximum mode stability. The technological aspects of plasma-chemical etching processes for forming a wedge-shaped profile of the edge of a silicon disk resonator are studied.https://www.mdpi.com/2304-6732/7/2/31whispering gallery modemicroresonatorsilicon disk resonatorwedge-shaped profilesilicon-on-isolatorplasma chemical etching |
| spellingShingle | Anastasia Yakuhina Alexey Kadochkin Vladimir Amelichev Dmitry Gorelov Sergey Generalov Research of Constructive and Technological Methods for Forming a Silicon Disk Resonator with Whispering Gallery Modes Photonics whispering gallery mode microresonator silicon disk resonator wedge-shaped profile silicon-on-isolator plasma chemical etching |
| title | Research of Constructive and Technological Methods for Forming a Silicon Disk Resonator with Whispering Gallery Modes |
| title_full | Research of Constructive and Technological Methods for Forming a Silicon Disk Resonator with Whispering Gallery Modes |
| title_fullStr | Research of Constructive and Technological Methods for Forming a Silicon Disk Resonator with Whispering Gallery Modes |
| title_full_unstemmed | Research of Constructive and Technological Methods for Forming a Silicon Disk Resonator with Whispering Gallery Modes |
| title_short | Research of Constructive and Technological Methods for Forming a Silicon Disk Resonator with Whispering Gallery Modes |
| title_sort | research of constructive and technological methods for forming a silicon disk resonator with whispering gallery modes |
| topic | whispering gallery mode microresonator silicon disk resonator wedge-shaped profile silicon-on-isolator plasma chemical etching |
| url | https://www.mdpi.com/2304-6732/7/2/31 |
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