Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method

Microcomponent manipulation (MCM) technology plays a decisive role in assembling complex systems at the micro- and nanoscale. However, the existing micromanipulation methods are difficult to widely apply in the manufacturing of microelectromechanical systems (MEMSs) due to the limited manipulation s...

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Principais autores: Dongjie Li, Mingrui Wang, Weibin Rong, Liu Yang, Donghao Xu, Yu Zhang
Formato: Artigo
Idioma:English
Publicado em: MDPI AG 2022-12-01
coleção:Micromachines
Assuntos:
Acesso em linha:https://www.mdpi.com/2072-666X/13/12/2151
_version_ 1827637694222565376
author Dongjie Li
Mingrui Wang
Weibin Rong
Liu Yang
Donghao Xu
Yu Zhang
author_facet Dongjie Li
Mingrui Wang
Weibin Rong
Liu Yang
Donghao Xu
Yu Zhang
author_sort Dongjie Li
collection DOAJ
description Microcomponent manipulation (MCM) technology plays a decisive role in assembling complex systems at the micro- and nanoscale. However, the existing micromanipulation methods are difficult to widely apply in the manufacturing of microelectromechanical systems (MEMSs) due to the limited manipulation space and complex application objects, and the manipulation efficiency is relatively low, which makes it difficult to industrialize these micromanipulating systems. To solve the above problems, this paper proposes an efficient metal MCM strategy based on the electrochemical method. To verify the feasibility and repeatability of the strategy, the finite element model (FEM) incorporating the hydrodynamic and electrochemical theories is used to calculate the local stress distribution of the contact position during the dynamic pick-up process. Based on the simulation results, we defined the relationship between the parameters, such as the optimal manipulating position and angle for picking, transferring and releasing. The failure behaviors of pick-up are built to realize the efficient three-dimensional manipulation of microcopper wire of 300 μm. By establishing a theoretical model and experimental verification, it was concluded that the middle point was the best manipulating position when picking up the microcopper wire, the most efficient picking angle was between 45 and 60 degrees for the pipette, and the average time was 480 s in three sets of picking–release manipulation experiments. This paper provides an achievable idea for different types of micro-object manipulations and promotes the rapid application of micromanipulation techniques in MEMSs.
first_indexed 2024-03-09T16:05:25Z
format Article
id doaj.art-a6a3e3c8722d4800b711fce15b6639e5
institution Directory Open Access Journal
issn 2072-666X
language English
last_indexed 2024-03-09T16:05:25Z
publishDate 2022-12-01
publisher MDPI AG
record_format Article
series Micromachines
spelling doaj.art-a6a3e3c8722d4800b711fce15b6639e52023-11-24T16:45:02ZengMDPI AGMicromachines2072-666X2022-12-011312215110.3390/mi13122151Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted MethodDongjie Li0Mingrui Wang1Weibin Rong2Liu Yang3Donghao Xu4Yu Zhang5Key Laboratory of Advanced Manufacturing and Intelligent Technology Ministry of Education, School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaKey Laboratory of Advanced Manufacturing and Intelligent Technology Ministry of Education, School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaState Key Laboratory of Robotics and System, School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, ChinaKey Laboratory of Advanced Manufacturing and Intelligent Technology Ministry of Education, School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaKey Laboratory of Advanced Manufacturing and Intelligent Technology Ministry of Education, School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaKey Laboratory of Advanced Manufacturing and Intelligent Technology Ministry of Education, School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaMicrocomponent manipulation (MCM) technology plays a decisive role in assembling complex systems at the micro- and nanoscale. However, the existing micromanipulation methods are difficult to widely apply in the manufacturing of microelectromechanical systems (MEMSs) due to the limited manipulation space and complex application objects, and the manipulation efficiency is relatively low, which makes it difficult to industrialize these micromanipulating systems. To solve the above problems, this paper proposes an efficient metal MCM strategy based on the electrochemical method. To verify the feasibility and repeatability of the strategy, the finite element model (FEM) incorporating the hydrodynamic and electrochemical theories is used to calculate the local stress distribution of the contact position during the dynamic pick-up process. Based on the simulation results, we defined the relationship between the parameters, such as the optimal manipulating position and angle for picking, transferring and releasing. The failure behaviors of pick-up are built to realize the efficient three-dimensional manipulation of microcopper wire of 300 μm. By establishing a theoretical model and experimental verification, it was concluded that the middle point was the best manipulating position when picking up the microcopper wire, the most efficient picking angle was between 45 and 60 degrees for the pipette, and the average time was 480 s in three sets of picking–release manipulation experiments. This paper provides an achievable idea for different types of micro-object manipulations and promotes the rapid application of micromanipulation techniques in MEMSs.https://www.mdpi.com/2072-666X/13/12/2151micromanipulationelectrochemicalmanipulation strategyfinite element simulation
spellingShingle Dongjie Li
Mingrui Wang
Weibin Rong
Liu Yang
Donghao Xu
Yu Zhang
Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
Micromachines
micromanipulation
electrochemical
manipulation strategy
finite element simulation
title Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title_full Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title_fullStr Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title_full_unstemmed Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title_short Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
title_sort study on the manipulation strategy of metallic microstructures based on electrochemical assisted method
topic micromanipulation
electrochemical
manipulation strategy
finite element simulation
url https://www.mdpi.com/2072-666X/13/12/2151
work_keys_str_mv AT dongjieli studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod
AT mingruiwang studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod
AT weibinrong studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod
AT liuyang studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod
AT donghaoxu studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod
AT yuzhang studyonthemanipulationstrategyofmetallicmicrostructuresbasedonelectrochemicalassistedmethod