Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method
Microcomponent manipulation (MCM) technology plays a decisive role in assembling complex systems at the micro- and nanoscale. However, the existing micromanipulation methods are difficult to widely apply in the manufacturing of microelectromechanical systems (MEMSs) due to the limited manipulation s...
Principais autores: | , , , , , |
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Formato: | Artigo |
Idioma: | English |
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MDPI AG
2022-12-01
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coleção: | Micromachines |
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Acesso em linha: | https://www.mdpi.com/2072-666X/13/12/2151 |
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author | Dongjie Li Mingrui Wang Weibin Rong Liu Yang Donghao Xu Yu Zhang |
author_facet | Dongjie Li Mingrui Wang Weibin Rong Liu Yang Donghao Xu Yu Zhang |
author_sort | Dongjie Li |
collection | DOAJ |
description | Microcomponent manipulation (MCM) technology plays a decisive role in assembling complex systems at the micro- and nanoscale. However, the existing micromanipulation methods are difficult to widely apply in the manufacturing of microelectromechanical systems (MEMSs) due to the limited manipulation space and complex application objects, and the manipulation efficiency is relatively low, which makes it difficult to industrialize these micromanipulating systems. To solve the above problems, this paper proposes an efficient metal MCM strategy based on the electrochemical method. To verify the feasibility and repeatability of the strategy, the finite element model (FEM) incorporating the hydrodynamic and electrochemical theories is used to calculate the local stress distribution of the contact position during the dynamic pick-up process. Based on the simulation results, we defined the relationship between the parameters, such as the optimal manipulating position and angle for picking, transferring and releasing. The failure behaviors of pick-up are built to realize the efficient three-dimensional manipulation of microcopper wire of 300 μm. By establishing a theoretical model and experimental verification, it was concluded that the middle point was the best manipulating position when picking up the microcopper wire, the most efficient picking angle was between 45 and 60 degrees for the pipette, and the average time was 480 s in three sets of picking–release manipulation experiments. This paper provides an achievable idea for different types of micro-object manipulations and promotes the rapid application of micromanipulation techniques in MEMSs. |
first_indexed | 2024-03-09T16:05:25Z |
format | Article |
id | doaj.art-a6a3e3c8722d4800b711fce15b6639e5 |
institution | Directory Open Access Journal |
issn | 2072-666X |
language | English |
last_indexed | 2024-03-09T16:05:25Z |
publishDate | 2022-12-01 |
publisher | MDPI AG |
record_format | Article |
series | Micromachines |
spelling | doaj.art-a6a3e3c8722d4800b711fce15b6639e52023-11-24T16:45:02ZengMDPI AGMicromachines2072-666X2022-12-011312215110.3390/mi13122151Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted MethodDongjie Li0Mingrui Wang1Weibin Rong2Liu Yang3Donghao Xu4Yu Zhang5Key Laboratory of Advanced Manufacturing and Intelligent Technology Ministry of Education, School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaKey Laboratory of Advanced Manufacturing and Intelligent Technology Ministry of Education, School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaState Key Laboratory of Robotics and System, School of Mechatronics Engineering, Harbin Institute of Technology, Harbin 150001, ChinaKey Laboratory of Advanced Manufacturing and Intelligent Technology Ministry of Education, School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaKey Laboratory of Advanced Manufacturing and Intelligent Technology Ministry of Education, School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaKey Laboratory of Advanced Manufacturing and Intelligent Technology Ministry of Education, School of Mechanical and Power Engineering, Harbin University of Science and Technology, Harbin 150080, ChinaMicrocomponent manipulation (MCM) technology plays a decisive role in assembling complex systems at the micro- and nanoscale. However, the existing micromanipulation methods are difficult to widely apply in the manufacturing of microelectromechanical systems (MEMSs) due to the limited manipulation space and complex application objects, and the manipulation efficiency is relatively low, which makes it difficult to industrialize these micromanipulating systems. To solve the above problems, this paper proposes an efficient metal MCM strategy based on the electrochemical method. To verify the feasibility and repeatability of the strategy, the finite element model (FEM) incorporating the hydrodynamic and electrochemical theories is used to calculate the local stress distribution of the contact position during the dynamic pick-up process. Based on the simulation results, we defined the relationship between the parameters, such as the optimal manipulating position and angle for picking, transferring and releasing. The failure behaviors of pick-up are built to realize the efficient three-dimensional manipulation of microcopper wire of 300 μm. By establishing a theoretical model and experimental verification, it was concluded that the middle point was the best manipulating position when picking up the microcopper wire, the most efficient picking angle was between 45 and 60 degrees for the pipette, and the average time was 480 s in three sets of picking–release manipulation experiments. This paper provides an achievable idea for different types of micro-object manipulations and promotes the rapid application of micromanipulation techniques in MEMSs.https://www.mdpi.com/2072-666X/13/12/2151micromanipulationelectrochemicalmanipulation strategyfinite element simulation |
spellingShingle | Dongjie Li Mingrui Wang Weibin Rong Liu Yang Donghao Xu Yu Zhang Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method Micromachines micromanipulation electrochemical manipulation strategy finite element simulation |
title | Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method |
title_full | Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method |
title_fullStr | Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method |
title_full_unstemmed | Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method |
title_short | Study on the Manipulation Strategy of Metallic Microstructures Based on Electrochemical-Assisted Method |
title_sort | study on the manipulation strategy of metallic microstructures based on electrochemical assisted method |
topic | micromanipulation electrochemical manipulation strategy finite element simulation |
url | https://www.mdpi.com/2072-666X/13/12/2151 |
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