Charge Density-Based Pyroelectric Vacuum Sensor

Charge Density-Based Pyroelectric Vacuum Sensor

A traditional thermal conductivity vacuum gauge mainly detects low pressure (the degree of vacuum) by measuring the temperature change of a filament heated by the electric current. We propose a novel pyroelectric vacuum sensor that utilizes the effect of ambient thermal conductivity on the pyroelect...

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Bibliografiske detaljer
Main Authors:	Lan Xu, Geng Huangfu, Yiping Guo, Ya Yang
Format:	Article
Sprog:	English
Udgivet:	American Association for the Advancement of Science (AAAS) 2023-01-01
Serier:	Research
Online adgang:	https://spj.science.org/doi/10.34133/research.0028

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