Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering
In this work, diamond-like carbon (DLC) films used as anti-reflective coatings for monocrystalline silicon were deposited by magnetron sputtering for potential application in solar cells. The microstructural and optical properties of the films were investigated as a function of substrate temperature...
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| Format: | Article |
| Language: | English |
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IOP Publishing
2021-01-01
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| Series: | Materials Research Express |
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| Online Access: | https://doi.org/10.1088/2053-1591/ac2445 |
| _version_ | 1827869353005023232 |
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| author | Xin Tan Hang Zhai Keke Meng Zhongyi Zhang |
| author_facet | Xin Tan Hang Zhai Keke Meng Zhongyi Zhang |
| author_sort | Xin Tan |
| collection | DOAJ |
| description | In this work, diamond-like carbon (DLC) films used as anti-reflective coatings for monocrystalline silicon were deposited by magnetron sputtering for potential application in solar cells. The microstructural and optical properties of the films were investigated as a function of substrate temperature over a wide range during deposition. It showed that, when the substrate temperature increased from RT to 800 °C, the hybridized structures of the DLC films accordingly changed associated with a significant variation of refractive index between2.22 and 1.64 at a wavelength of 550 nm. Three types of coating systems, namely single-, three- and five-layer films on monocrystalline silicon substrates, were designed based on the anti-reflection principle and fabricated in terms of the relationships of refractive index and deposition rate with substrate temperature. In particular, a well-designed three-layer film, of which the refractive index gradually changed along the thickness, that is 1.8, 1.9 and 2.0, respectively, was successfully deposited at one step on monocrystalline silicon substrates by adjusting substrate temperature and deposition time, and featured a broadband anti-reflective characteristic with low average reflectivity of 8.7% at a wide solar spectrum of 400–1100 nm. This work demonstrates that the DLC film has a promising application potential as broadband anti-reflective coatings in silicon-based solar cells. |
| first_indexed | 2024-03-12T15:43:21Z |
| format | Article |
| id | doaj.art-a6bd82c11ee94298880a3e38c471318b |
| institution | Directory Open Access Journal |
| issn | 2053-1591 |
| language | English |
| last_indexed | 2024-03-12T15:43:21Z |
| publishDate | 2021-01-01 |
| publisher | IOP Publishing |
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| series | Materials Research Express |
| spelling | doaj.art-a6bd82c11ee94298880a3e38c471318b2023-08-09T15:52:19ZengIOP PublishingMaterials Research Express2053-15912021-01-018909640210.1088/2053-1591/ac2445Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputteringXin Tan0https://orcid.org/0000-0001-8314-8032Hang Zhai1Keke Meng2Zhongyi Zhang3College of Mechanical Engineering, Inner Mongolia University of Science & Technology , Baotou 014010, People’s Republic of ChinaCollege of Mechanical Engineering, Inner Mongolia University of Science & Technology , Baotou 014010, People’s Republic of ChinaCollege of Mechanical Engineering, Inner Mongolia University of Science & Technology , Baotou 014010, People’s Republic of ChinaCollege of Mechanical Engineering, Inner Mongolia University of Science & Technology , Baotou 014010, People’s Republic of ChinaIn this work, diamond-like carbon (DLC) films used as anti-reflective coatings for monocrystalline silicon were deposited by magnetron sputtering for potential application in solar cells. The microstructural and optical properties of the films were investigated as a function of substrate temperature over a wide range during deposition. It showed that, when the substrate temperature increased from RT to 800 °C, the hybridized structures of the DLC films accordingly changed associated with a significant variation of refractive index between2.22 and 1.64 at a wavelength of 550 nm. Three types of coating systems, namely single-, three- and five-layer films on monocrystalline silicon substrates, were designed based on the anti-reflection principle and fabricated in terms of the relationships of refractive index and deposition rate with substrate temperature. In particular, a well-designed three-layer film, of which the refractive index gradually changed along the thickness, that is 1.8, 1.9 and 2.0, respectively, was successfully deposited at one step on monocrystalline silicon substrates by adjusting substrate temperature and deposition time, and featured a broadband anti-reflective characteristic with low average reflectivity of 8.7% at a wide solar spectrum of 400–1100 nm. This work demonstrates that the DLC film has a promising application potential as broadband anti-reflective coatings in silicon-based solar cells.https://doi.org/10.1088/2053-1591/ac2445diamond-like carbonmagnetron sputteringmicrostructural evolutionoptical propertiesanti-reflective coating |
| spellingShingle | Xin Tan Hang Zhai Keke Meng Zhongyi Zhang Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering Materials Research Express diamond-like carbon magnetron sputtering microstructural evolution optical properties anti-reflective coating |
| title | Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering |
| title_full | Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering |
| title_fullStr | Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering |
| title_full_unstemmed | Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering |
| title_short | Anti-reflection for monocrystalline silicon from diamond-like carbon films deposited by magnetron sputtering |
| title_sort | anti reflection for monocrystalline silicon from diamond like carbon films deposited by magnetron sputtering |
| topic | diamond-like carbon magnetron sputtering microstructural evolution optical properties anti-reflective coating |
| url | https://doi.org/10.1088/2053-1591/ac2445 |
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